From tberg at snf.stanford.edu Tue Jul 5 07:11:50 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 5 Jul 2005 07:11:50 -0700 Subject: Problem tylannitride SNF 2005-06-23 01:01:16: Pump10 problem Message-ID: cleaned soft pump-no further issues From mdickey at snf.stanford.edu Tue Jul 19 05:54:50 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 19 Jul 2005 05:54:50 -0700 Subject: Shutdown tylannitride SNF 2005-07-19 05:54:50: tube pull Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Wed Jul 20 07:21:32 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 20 Jul 2005 07:21:32 -0700 Subject: Comment tylannitride SNF 2005-07-20 07:21:31: Test Message-ID: Tube is in coat. When done it will need a test From maurice at snf.stanford.edu Wed Jul 20 13:49:51 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jul 2005 13:49:51 -0700 Subject: Comment tylannitride SNF 2005-07-20 07:21:31: Test Message-ID: test complete From maurice at snf.stanford.edu Wed Jul 20 13:50:06 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jul 2005 13:50:06 -0700 Subject: Shutdown tylannitride SNF 2005-07-19 05:54:50: tube pull Message-ID: test complete From seoung at snf.stanford.edu Thu Jul 21 16:13:05 2005 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Thu, 21 Jul 2005 16:13:05 -0700 Subject: Problem tylannitride SNF 2005-07-21 16:13:02: Uniformity problem Message-ID: Uniformity on wafers is bad. I ran 5 wafers and four of them have some lines on the center of wafers. From tberg at snf.stanford.edu Thu Jul 28 12:26:29 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 28 Jul 2005 12:26:29 -0700 Subject: Problem tylannitride SNF 2005-07-21 16:13:02: Uniformity problem Message-ID: Other users after had no problems