From harshal at snf.stanford.edu Sun May 1 01:57:58 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Sun, 1 May 2005 01:57:58 -0700 Subject: Problem tylannitride SNF 2005-05-01 01:57:58: tycom computer stuck. cannot take command to load pump program for # 10. Message-ID: i used the tylan nitride and was about to load the pump program when i found that the tycom computer is not getting into the command prompt. it is hung up on tube 11 and is ocnstantly displaying status on tube 11 without the command prompt. From lindaw at snf.stanford.edu Sun May 1 11:24:34 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 1 May 2005 11:24:34 -0700 Subject: Shutdown tylannitride SNF 2005-05-01 11:24:34: unable to load pump10. tycom computer stuck Message-ID: so I went ahead and shut down this tube too. From lindaw at snf.stanford.edu Sun May 1 11:37:22 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 1 May 2005 11:37:22 -0700 Subject: Comment tylannitride SNF 2005-05-01 11:37:22: CTRL C has cleared the infinite loop display Message-ID: There is now a command prompt. Thanks to Ray Woo. From tberg at snf.stanford.edu Mon May 2 06:25:28 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 May 2005 06:25:28 -0700 Subject: Comment tylannitride SNF 2005-04-29 16:49:05: New dummies added Message-ID: noted From tberg at snf.stanford.edu Mon May 2 06:25:55 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 May 2005 06:25:55 -0700 Subject: Problem tylannitride SNF 2005-05-01 01:57:58: tycom computer stuck. cannot take command to load pump program for # 10. Message-ID: Control -c fixed issue From tberg at snf.stanford.edu Mon May 2 06:26:36 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 May 2005 06:26:36 -0700 Subject: Shutdown tylannitride SNF 2005-05-01 11:24:34: unable to load pump10. tycom computer stuck Message-ID: Control-c fixed problem. someone had to start the problem From tberg at snf.stanford.edu Mon May 2 06:26:46 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 May 2005 06:26:46 -0700 Subject: Comment tylannitride SNF 2005-05-01 11:37:22: CTRL C has cleared the infinite loop display Message-ID: noted From maurice at snf.stanford.edu Thu May 19 17:53:44 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 May 2005 17:53:44 -0700 Subject: Problem tylannitride SNF 2005-04-25 21:54:21: tylan nitride- particles Message-ID: run a load of 50 wafers...Nitride2...1900Ang looks good...very few particles From kwang at snf.stanford.edu Sat May 21 18:40:52 2005 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Sat, 21 May 2005 18:40:52 -0700 Subject: Comment tylannitride SNF 2005-05-21 18:40:52: pump problem Message-ID: the furnace passed leak check, but seemed failed to repump. So it aborted from step 55. we tried again and it was fine. From kwang at snf.stanford.edu Sat May 21 19:05:30 2005 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Sat, 21 May 2005 19:05:30 -0700 Subject: Comment tylannitride SNF 2005-05-21 19:05:29: also the alarm went off Message-ID: at the end of pump10 program. it wasn't like this before? From bchui at snf.stanford.edu Sun May 22 00:43:24 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 22 May 2005 00:43:24 -0700 Subject: Problem tylannitride SNF 2005-05-22 00:43:24: Fails at step 50 Message-ID: Was running NITRIDE2, passed leak check (steps 35/40) but failed at step 50 and jumped directly to step 80. Gate valve seemed to turn off unexpectedly during step 50, causing PRCPR to jump to 2000.0. Retried recipe three times without success. Previous user reported similar problem with LONH378 but succeeded on second try. From bchui at snf.stanford.edu Sun May 22 01:36:19 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 22 May 2005 01:36:19 -0700 Subject: Problem tylannitride SNF 2005-05-22 01:36:18: Can't load PUMP10 Message-ID: Tycom is frozen. Can't load or run PUMP10. From bchui at snf.stanford.edu Sun May 22 15:54:26 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 22 May 2005 15:54:26 -0700 Subject: Problem tylannitride SNF 2005-05-22 15:54:25: Started PUMP10 Message-ID: Tycom was operational today, so I loaded PUMP10 and started the program. From bchui at snf.stanford.edu Sun May 22 16:07:13 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 22 May 2005 16:07:13 -0700 Subject: Problem tylannitride SNF 2005-05-22 16:07:13: PUMP10 alarmed and aborted Message-ID: From mdickey at snf.stanford.edu Mon May 23 06:46:27 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 May 2005 06:46:27 -0700 Subject: Problem tylannitride SNF 2005-05-22 16:07:13: PUMP10 alarmed and aborted Message-ID: Tube is back in pump program and tube is pumping down fine and the rate of rise is good From mdickey at snf.stanford.edu Mon May 23 06:46:45 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 May 2005 06:46:45 -0700 Subject: Problem tylannitride SNF 2005-05-22 15:54:25: Started PUMP10 Message-ID: Back in pump program From mdickey at snf.stanford.edu Mon May 23 06:47:01 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 May 2005 06:47:01 -0700 Subject: Problem tylannitride SNF 2005-05-22 01:36:18: Can't load PUMP10 Message-ID: Back iin pump program From mdickey at snf.stanford.edu Mon May 23 09:43:57 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 May 2005 09:43:57 -0700 Subject: Problem tylannitride SNF 2005-05-22 00:43:24: Fails at step 50 Message-ID: Ran Nitride2 twice with no problems From mdickey at snf.stanford.edu Mon May 23 09:44:27 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 May 2005 09:44:27 -0700 Subject: Comment tylannitride SNF 2005-05-21 19:05:29: also the alarm went off Message-ID: noted From mdickey at snf.stanford.edu Mon May 23 09:44:45 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 May 2005 09:44:45 -0700 Subject: Comment tylannitride SNF 2005-05-21 18:40:52: pump problem Message-ID: noted From rwoo at snf.stanford.edu Tue May 24 00:06:28 2005 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Tue, 24 May 2005 00:06:28 -0700 Subject: Comment tylannitride SNF 2005-05-24 00:06:27: PUMP10 alarm Message-ID: PUMP10 alarmed and aborted at 12am on 5/24. Seems to be the same thing that has been happening recently. TYCOM sayssomething like "I/O error. Program aborted" but it scrolled off the window before I could write it down. PUMP10 restarted sucessfully. From rwoo at snf.stanford.edu Tue May 24 00:28:15 2005 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Tue, 24 May 2005 00:28:15 -0700 Subject: Problem tylannitride SNF 2005-05-24 00:28:15: Message-ID: Same error as previous comment happend twice more - tube lefft not pumped down. ---------------- In the holding step, PUMP10 will suddently abort and alarm - tycom shows the following error message: TUBE001 I/O ERROR TASK COMPLETE From harshal at snf.stanford.edu Thu May 26 19:35:01 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Thu, 26 May 2005 19:35:01 -0700 Subject: Problem tylannitride SNF 2005-05-26 19:35:01: cannot run PUMP10 program Message-ID: Alarm was acknowledged and tried again, but no success. PUMP program not running. From seymour at snf.stanford.edu Fri May 27 09:13:35 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 27 May 2005 09:13:35 -0700 Subject: Problem tylannitride SNF 2005-05-26 19:35:01: cannot run PUMP10 program Message-ID: Mike cleaned slow pump valve. pump down great now From seymour at snf.stanford.edu Fri May 27 09:14:42 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 27 May 2005 09:14:42 -0700 Subject: Problem tylannitride SNF 2005-05-24 00:28:15: Message-ID: tube 001 error message not for this tube. pumping works great at this time. From seymour at snf.stanford.edu Fri May 27 09:16:34 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 27 May 2005 09:16:34 -0700 Subject: Comment tylannitride SNF 2005-05-24 00:06:27: PUMP10 alarm Message-ID: Tube was pumping to slow to pass pump10 time limit. The I?O error message was for another tube (TUBE1) From jackson at snf.stanford.edu Sat May 28 17:09:37 2005 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sat, 28 May 2005 17:09:37 -0700 Subject: Problem tylannitride SNF 2005-05-28 17:09:36: gate valve sticking- aborting Message-ID: gate valve slow and sometimes doesn't open at all... critical steps after leak check, prior to gas flows, may abort if gate valve sticks From jackson at snf.stanford.edu Sun May 29 10:50:54 2005 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 29 May 2005 10:50:54 -0700 Subject: Problem tylannitride SNF 2005-05-29 10:50:53: won't run pump10 Message-ID: From jackson at snf.stanford.edu Sun May 29 10:55:11 2005 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 29 May 2005 10:55:11 -0700 Subject: Problem tylannitride SNF 2005-05-29 10:55:11: gate/valve pressure problem Message-ID: gate valve now turns off and on intermittenly during step such as temp stab. step #25, process aborted in step 30 because the gate valve did not come on and prcpr still high. Do not recommend using this ...could this happen during deposition!!!! From tberg at snf.stanford.edu Tue May 31 06:33:09 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 31 May 2005 06:33:09 -0700 Subject: Problem tylannitride SNF 2005-05-28 17:09:36: gate valve sticking- aborting Message-ID: same problem From tberg at snf.stanford.edu Tue May 31 06:33:31 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 31 May 2005 06:33:31 -0700 Subject: Problem tylannitride SNF 2005-05-29 10:50:53: won't run pump10 Message-ID: same problem