From tberg at snf.stanford.edu Thu Oct 6 06:32:26 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 6 Oct 2005 06:32:26 -0700 Subject: Problem tylannitride SNF 2005-09-23 19:13:30: Pieces of wafer possibly in the furnace Message-ID: Noted From tberg at snf.stanford.edu Tue Oct 18 07:40:08 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Oct 2005 07:40:08 -0700 Subject: Shutdown tylannitride SNF 2005-10-18 07:40:07: Changing NH3 Regulator Message-ID: From mdickey at snf.stanford.edu Tue Oct 18 13:40:58 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 18 Oct 2005 13:40:58 -0700 Subject: Comment tylannitride SNF 2005-10-18 13:40:57: slow pump Message-ID: Cleaned slow pump due to concerns about particles. May need test tomorrow after regulator pressure a check From tberg at snf.stanford.edu Tue Oct 18 15:14:15 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Oct 2005 15:14:15 -0700 Subject: Comment tylannitride SNF 2005-10-18 15:14:10: Regulator changed Pressure check Message-ID: From tberg at snf.stanford.edu Wed Oct 19 06:55:32 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2005 06:55:32 -0700 Subject: Comment tylannitride SNF 2005-10-18 13:40:57: slow pump Message-ID: cleaned From tberg at snf.stanford.edu Wed Oct 19 06:55:49 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2005 06:55:49 -0700 Subject: Comment tylannitride SNF 2005-10-18 15:14:10: Regulator changed Pressure check Message-ID: Pressure held fine From tberg at snf.stanford.edu Wed Oct 19 06:56:13 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2005 06:56:13 -0700 Subject: Shutdown tylannitride SNF 2005-10-18 07:40:07: Changing NH3 Regulator Message-ID: Regulator replaced leak check fine From tberg at snf.stanford.edu Wed Oct 19 06:56:55 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2005 06:56:55 -0700 Subject: Problem tylannitride SNF 2005-10-19 06:56:55: Needs test after reg change Message-ID: From maurice at snf.stanford.edu Wed Oct 19 14:03:55 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Oct 2005 14:03:55 -0700 Subject: Problem tylannitride SNF 2005-10-19 06:56:55: Needs test after reg change Message-ID: Dep rate test is good. From seymour at snf.stanford.edu Thu Oct 20 13:51:17 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Oct 2005 13:51:17 -0700 Subject: Problem tylannitride SNF 2005-10-20 13:51:16: run skipped deposition using lonh378 Message-ID: I checked base and leak rate, both were very good, base 2 mT leak less then 10 mT/min. User will restart recipe and try again. Mike said a user this morning had the same problem. From maurice at snf.stanford.edu Fri Oct 21 11:41:56 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 21 Oct 2005 11:41:56 -0700 Subject: Problem tylannitride SNF 2005-10-21 11:41:55: falls out of pump program Message-ID: From jrjain at snf.stanford.edu Fri Oct 21 17:25:15 2005 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 21 Oct 2005 17:25:15 -0700 Subject: Problem tylannitride SNF 2005-10-21 17:25:04: PUMP10 Fails Message-ID: PUMP10 fails in Step 25. Numerous reruns were conducted, with each ending improperly. Tube has been left in READY state as per staff instructions. From tberg at snf.stanford.edu Mon Oct 24 06:16:13 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Oct 2005 06:16:13 -0700 Subject: Shutdown tylannitride SNF 2005-10-24 06:16:12: Down for scheduled Pull and clean Message-ID: From mdickey at snf.stanford.edu Mon Oct 24 13:46:23 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 24 Oct 2005 13:46:23 -0700 Subject: Comment tylannitride SNF 2005-10-24 13:46:22: Test Message-ID: Pull and clean is done. Needs test and coat. From tberg at snf.stanford.edu Tue Oct 25 06:17:55 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2005 06:17:55 -0700 Subject: Problem tylannitride SNF 2005-10-21 11:41:55: falls out of pump program Message-ID: noted From tberg at snf.stanford.edu Tue Oct 25 06:18:05 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2005 06:18:05 -0700 Subject: Problem tylannitride SNF 2005-10-20 13:51:16: run skipped deposition using lonh378 Message-ID: noted From maurice at snf.stanford.edu Tue Oct 25 16:01:38 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Oct 2005 16:01:38 -0700 Subject: Problem tylannitride SNF 2005-10-21 17:25:04: PUMP10 Fails Message-ID: fixed From maurice at snf.stanford.edu Tue Oct 25 16:02:42 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Oct 2005 16:02:42 -0700 Subject: Shutdown tylannitride SNF 2005-10-24 06:16:12: Down for scheduled Pull and clean Message-ID: pulled and cleaned user will test From maurice at snf.stanford.edu Tue Oct 25 16:03:18 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Oct 2005 16:03:18 -0700 Subject: Problem tylannitride SNF 2005-10-25 16:03:18: needs test Message-ID: users will test after pull and clean From tberg at snf.stanford.edu Wed Oct 26 06:48:47 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Oct 2005 06:48:47 -0700 Subject: Comment tylannitride SNF 2005-10-24 13:46:22: Test Message-ID: noted From king at snf.stanford.edu Wed Oct 26 10:37:53 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 26 Oct 2005 10:37:53 -0700 Subject: Problem tylannitride SNF 2005-10-26 10:37:52: TylanLPCVDs- Found non-metal wand broken Message-ID: From mdickey at snf.stanford.edu Wed Oct 26 11:37:18 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2005 11:37:18 -0700 Subject: Problem tylannitride SNF 2005-10-26 10:37:52: TylanLPCVDs- Found non-metal wand broken Message-ID: wand replaced From mdickey at snf.stanford.edu Wed Oct 26 11:37:32 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2005 11:37:32 -0700 Subject: Problem tylannitride SNF 2005-10-25 16:03:18: needs test Message-ID: test done