From seymour at snf.stanford.edu Wed Sep 7 10:04:25 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Sep 2005 10:04:25 -0700 Subject: Comment tylannitride SNF 2005-09-07 10:04:25: vacuum valve check out Message-ID: replaced molex pins on male end and tightened female pins. checked operation, ok. From jackson at snf.stanford.edu Tue Sep 20 01:33:58 2005 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Tue, 20 Sep 2005 01:33:58 -0700 Subject: Problem tylannitride SNF 2005-09-20 01:33:56: process aborted prior to deposition Message-ID: leak check went well but aborted before dep From jasmine at snf.stanford.edu Fri Sep 23 19:13:32 2005 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Fri, 23 Sep 2005 19:13:32 -0700 Subject: Problem tylannitride SNF 2005-09-23 19:13:30: Pieces of wafer possibly in the furnace Message-ID: One of my wafers broke during the nitride2 run and I believe their could be pieces inside the furnace. From maurice at snf.stanford.edu Mon Sep 26 09:46:21 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Sep 2005 09:46:21 -0700 Subject: Problem tylannitride SNF 2005-09-20 01:33:56: process aborted prior to deposition Message-ID: logged From maurice at snf.stanford.edu Mon Sep 26 09:46:36 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Sep 2005 09:46:36 -0700 Subject: Comment tylannitride SNF 2005-09-07 10:04:25: vacuum valve check out Message-ID: logged