From rmelamud at snf.stanford.edu Sun Apr 9 22:46:19 2006 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Sun, 9 Apr 2006 22:46:19 -0700 Subject: Shutdown tylannitride SNF 2006-04-09 22:46:19: nitride tube not pumping down Message-ID: problem with pumpdown. Reaches gross leak check step and and immediately aborts run. Tried to run PUMP10, but same problem. From mdickey at snf.stanford.edu Mon Apr 10 07:54:51 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Apr 2006 07:54:51 -0700 Subject: Shutdown tylannitride SNF 2006-04-09 22:46:19: nitride tube not pumping down Message-ID: cleaned dirty slow pump, system ready for use From yeh at snf.stanford.edu Fri Apr 14 03:24:06 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 14 Apr 2006 03:24:06 -0700 Subject: Problem tylannitride SNF 2006-04-14 03:24:06: Load TC not working Message-ID: front zone temperature remained at 400C until I aborted the run at step 55. status did not indicate 'B' next to TEMPL even though the temp was supposed to be 779C. also, front panel LED indicated front zone heater not firing. From mdickey at snf.stanford.edu Fri Apr 14 07:08:03 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 14 Apr 2006 07:08:03 -0700 Subject: Problem tylannitride SNF 2006-04-14 03:24:06: Load TC not working Message-ID: tightened connections...working now From sanjah at snf.stanford.edu Fri Apr 14 19:12:17 2006 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Fri, 14 Apr 2006 19:12:17 -0700 Subject: Problem tylannitride SNF 2006-04-14 19:12:16: clean vacuum wand is broken Message-ID: From mdickey at snf.stanford.edu Mon Apr 17 06:43:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Apr 2006 06:43:54 -0700 Subject: Problem tylannitride SNF 2006-04-14 19:12:16: clean vacuum wand is broken Message-ID: tip replaced From yeh at snf.stanford.edu Tue Apr 18 20:45:57 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 18 Apr 2006 20:45:57 -0700 Subject: Problem tylannitride SNF 2006-04-18 20:45:55: front zone LED not working on panel Message-ID: From tberg at snf.stanford.edu Wed Apr 19 06:58:36 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Apr 2006 06:58:36 -0700 Subject: Comment tylannitride SNF 2006-02-13 18:04:19: MFS alarms, low dep rate Message-ID: resolved From mdickey at snf.stanford.edu Mon Apr 24 09:44:18 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 24 Apr 2006 09:44:18 -0700 Subject: Shutdown tylannitride SNF 2006-04-24 09:44:17: Recirculator Message-ID: Recirculator for DCS needs to be changed From seymour at snf.stanford.edu Mon Apr 24 14:06:08 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Apr 2006 14:06:08 -0700 Subject: Shutdown tylannitride SNF 2006-04-24 09:44:17: Recirculator Message-ID: running DCS at 190 SCCM with no problem with delivery pressure. Recirc still faulty but supply pressure is stable at 5 psi. From seymour at snf.stanford.edu Mon Apr 24 14:07:57 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Apr 2006 14:07:57 -0700 Subject: Problem tylannitride SNF 2006-04-24 14:07:56: DCS recirc has temp controll issues Message-ID: supply to tool is stable at 5 psi and I have been r5unning 190 sccm of DCS with out any problems in supply pressur. From maurice at snf.stanford.edu Tue Apr 25 17:36:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Apr 2006 17:36:01 -0700 Subject: Problem tylannitride SNF 2006-04-24 14:07:56: DCS recirc has temp controll issues Message-ID: Ran Nitride2 recipe and got desired dep rate From maurice at snf.stanford.edu Fri Apr 28 09:23:58 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Apr 2006 09:23:58 -0700 Subject: Problem tylannitride SNF 2006-04-18 20:45:55: front zone LED not working on panel Message-ID: logged