Problem tylannitride SNF 2006-04-24 14:07:56: DCS recirc has temp controll issues

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Apr 24 14:07:57 PDT 2006


supply to tool is stable at 5 psi and I have been r5unning 190 sccm of DCS with out any problems in supply pressur.




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