From fatihs at snf.stanford.edu  Tue Aug  1 23:40:01 2006
From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu)
Date: Tue, 1 Aug 2006 23:40:01 -0700
Subject: Problem tylannitride SNF 2006-08-01 23:40:01: found vacuum wand broken
Message-ID: <mailman.876.1357938953.26006.tylannitride-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Wed Aug  2 06:29:55 2006
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 2 Aug 2006 06:29:55 -0700
Subject: Problem tylannitride SNF 2006-08-01 23:40:01: found vacuum wand broken
Message-ID: <mailman.877.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

Tip replaced



From libei at snf.stanford.edu  Mon Aug  7 22:39:24 2006
From: libei at snf.stanford.edu (libei at snf.stanford.edu)
Date: Mon, 7 Aug 2006 22:39:24 -0700
Subject: Problem tylannitride SNF 2006-08-07 22:39:23: NH3 Leak
Message-ID: <mailman.878.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

MFS alarms at step 110 of Nitride2. Thickness is far away from expected and not uniform. 



From maurice at snf.stanford.edu  Tue Aug  8 14:36:25 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 8 Aug 2006 14:36:25 -0700
Subject: Problem tylannitride SNF 2006-08-07 22:39:23: NH3 Leak
Message-ID: <mailman.879.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

The next user ran the same program and got noral thickness and normal uniformity.
I am not sure what libei was putting nitride on.  It may give a problem reading the nitride layer.



From mdickey at snf.stanford.edu  Thu Aug 24 06:00:50 2006
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 24 Aug 2006 06:00:50 -0700
Subject: Shutdown tylannitride SNF 2006-08-24 06:00:49: Tube pull
Message-ID: <mailman.880.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

Down for pull and clean



From maurice at snf.stanford.edu  Mon Aug 28 14:24:27 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 28 Aug 2006 14:24:27 -0700
Subject: Shutdown tylannitride SNF 2006-08-24 06:00:49: Tube pull
Message-ID: <mailman.881.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

pulled, cleaned, coated and tested
deposition rate and uniformity normal



From maurice at snf.stanford.edu  Mon Aug 28 14:29:25 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 28 Aug 2006 14:29:25 -0700
Subject: Comment tylannitride SNF 2006-08-28 14:29:25: test good
Message-ID: <mailman.882.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

lonh378   00:30:00
front boat  (c,t,b,r,l)
846, 865, 847, 850, 850
873, 887, 875, 873, 884
rear boat
915, 917, 915, 915, 921
945, 945, 940, 940, 945



From chozone at snf.stanford.edu  Tue Aug 29 22:33:39 2006
From: chozone at snf.stanford.edu (chozone at snf.stanford.edu)
Date: Tue, 29 Aug 2006 22:33:39 -0700
Subject: Problem tylannitride SNF 2006-08-29 22:33:38: Pump Fail -- leakage from the seal
Message-ID: <mailman.883.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

It ran after pushing the tube softely 



From seymour at snf.stanford.edu  Wed Aug 30 08:57:15 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 30 Aug 2006 08:57:15 -0700
Subject: Problem tylannitride SNF 2006-08-29 22:33:38: Pump Fail -- leakage from the seal
Message-ID: <mailman.884.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

opened door and closed it in manual, worked ok. Did the same in auto with no door seal problems.