Problem tylannitride SNF 2006-08-07 22:39:23: NH3 Leak

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Aug 8 14:36:25 PDT 2006


The next user ran the same program and got noral thickness and normal uniformity.
I am not sure what libei was putting nitride on.  It may give a problem reading the nitride layer.




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