Problem tylannitride SNF 2006-12-17 00:33:06: Process pressure HIGH

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Dec 17 00:33:06 PST 2006


When observing the previous user's run, the process pressure was slowly rising from 300 to 1000 over the course of 1.5 hours during the deposition step.  Use at your own risk.




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