From mdickey at snf.stanford.edu Wed Feb 1 06:02:31 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Feb 2006 06:02:31 -0800 Subject: Shutdown tylannitride SNF 2006-02-01 06:02:30: tube pull Message-ID: down for pull and clean From mdickey at snf.stanford.edu Wed Feb 1 13:45:11 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Feb 2006 13:45:11 -0800 Subject: Comment tylannitride SNF 2006-02-01 13:44:31: Tests Message-ID: Tube has been pulled and clean....needs hot leak check when temp stabilizes then will need coat and test From maurice at snf.stanford.edu Thu Feb 2 14:57:21 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:57:21 -0800 Subject: Shutdown tylannitride SNF 2006-02-01 06:02:30: tube pull Message-ID: clean complete From maurice at snf.stanford.edu Thu Feb 2 15:21:45 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Feb 2006 15:21:45 -0800 Subject: Comment tylannitride SNF 2006-02-01 13:44:31: Tests Message-ID: dep rate good From tberg at snf.stanford.edu Fri Feb 3 06:37:25 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Feb 2006 06:37:25 -0800 Subject: Problem tylannitride SNF 2006-01-23 11:45:28: MFS alarm in pump10 Message-ID: noted From tberg at snf.stanford.edu Fri Feb 3 06:37:52 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Feb 2006 06:37:52 -0800 Subject: Problem tylannitride SNF 2006-01-24 21:08:34: MFS alarm, nitride Message-ID: Has not reoccured From tag at snf.stanford.edu Sat Feb 4 18:39:12 2006 From: tag at snf.stanford.edu (tag at snf.stanford.edu) Date: Sat, 4 Feb 2006 18:39:12 -0800 Subject: Problem tylannitride SNF 2006-02-04 18:39:12: Leak check failed Message-ID: The door wouldn't seal then gate valve doesn't work. Ericp suggested to check sealing. From levi at snf.stanford.edu Sun Feb 5 23:16:22 2006 From: levi at snf.stanford.edu (levi at snf.stanford.edu) Date: Sun, 5 Feb 2006 23:16:22 -0800 Subject: Problem tylannitride SNF 2006-02-05 23:16:21: tube does not seal - leak check fail.. Message-ID: in my nitride deposition tody, we noticed that like last night, the tube has some troubles in getting good seal in closing at the start of the recipe. At my first 2 runs , Eric assisted the tube closure manually, and the deposition was OK. In the third deposition, the tube did not seal well, and after the 25 minutes ramp up, failed at the leak check steps 30-35/ There is an interlock error at the back controller behind the tube at the service area. The system jumpled to spet 110, upon leak failure. I will try to hold the system. while letting the tube cool manually and unload my wafers. Ofer Levi From tberg at snf.stanford.edu Mon Feb 6 07:00:03 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Feb 2006 07:00:03 -0800 Subject: Problem tylannitride SNF 2006-02-04 18:39:12: Leak check failed Message-ID: Adjusted door From tberg at snf.stanford.edu Mon Feb 6 07:00:17 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Feb 2006 07:00:17 -0800 Subject: Problem tylannitride SNF 2006-02-05 23:16:21: tube does not seal - leak check fail.. Message-ID: Adjusted door From jinyao at snf.stanford.edu Thu Feb 9 22:22:28 2006 From: jinyao at snf.stanford.edu (jinyao at snf.stanford.edu) Date: Thu, 9 Feb 2006 22:22:28 -0800 Subject: Problem tylannitride SNF 2006-02-09 22:22:28: door sensor Message-ID: DNTLK is always showing off, pump can not go further From mdickey at snf.stanford.edu Mon Feb 13 07:55:46 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 13 Feb 2006 07:55:46 -0800 Subject: Shutdown tylannitride SNF 2006-02-13 07:55:46: pump Message-ID: Needs pump change From mdickey at snf.stanford.edu Mon Feb 13 10:52:00 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 13 Feb 2006 10:52:00 -0800 Subject: Shutdown tylannitride SNF 2006-02-13 07:55:46: pump Message-ID: Pump replaced and door adjusted. twied twice successfully. Door is still intermitently problematic From mdickey at snf.stanford.edu Mon Feb 13 10:52:29 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 13 Feb 2006 10:52:29 -0800 Subject: Problem tylannitride SNF 2006-02-09 22:22:28: door sensor Message-ID: noted From hopcroft at snf.stanford.edu Mon Feb 13 18:04:21 2006 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Mon, 13 Feb 2006 18:04:21 -0800 Subject: Comment tylannitride SNF 2006-02-13 18:04:19: MFS alarms, low dep rate Message-ID: NH3 MFS alarm caused run to abort at step 30 with message "NH3 LEAK". Tried again, no problem until step 115 (!), MFS alarm. Dep rate was lower than expected. From sanda at snf.stanford.edu Mon Feb 13 19:59:36 2006 From: sanda at snf.stanford.edu (sanda at snf.stanford.edu) Date: Mon, 13 Feb 2006 19:59:36 -0800 Subject: Comment tylannitride SNF 2006-02-13 19:59:35: pump down failure Message-ID: From tag at snf.stanford.edu Tue Feb 14 01:55:53 2006 From: tag at snf.stanford.edu (tag at snf.stanford.edu) Date: Tue, 14 Feb 2006 01:55:53 -0800 Subject: Problem tylannitride SNF 2006-02-14 01:55:52: seal? Message-ID: process pressure was high (~500). sometimes, base pressure failed. From axiu at snf.stanford.edu Wed Feb 15 11:01:34 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Wed, 15 Feb 2006 11:01:34 -0800 Subject: Problem tylannitride SNF 2006-02-15 11:01:33: pump down failure Message-ID: From axiu at snf.stanford.edu Wed Feb 15 11:24:15 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Wed, 15 Feb 2006 11:24:15 -0800 Subject: Comment tylannitride SNF 2006-02-15 11:24:15: pass now Message-ID: From axiu at snf.stanford.edu Thu Feb 16 07:58:13 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 16 Feb 2006 07:58:13 -0800 Subject: Problem tylannitride SNF 2006-02-16 07:58:12: jump to 115 at 30step Message-ID: From seymour at snf.stanford.edu Fri Feb 17 11:41:21 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:41:21 -0800 Subject: Problem tylannitride SNF 2006-02-16 07:58:12: jump to 115 at 30step Message-ID: door seal replaced From seymour at snf.stanford.edu Fri Feb 17 11:41:39 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:41:39 -0800 Subject: Comment tylannitride SNF 2006-02-15 11:24:15: pass now Message-ID: noted From seymour at snf.stanford.edu Fri Feb 17 11:41:57 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:41:57 -0800 Subject: Problem tylannitride SNF 2006-02-15 11:01:33: pump down failure Message-ID: problem addressed From seymour at snf.stanford.edu Fri Feb 17 11:42:14 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:42:14 -0800 Subject: Problem tylannitride SNF 2006-02-14 01:55:52: seal? Message-ID: replaced From seymour at snf.stanford.edu Fri Feb 17 11:42:31 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:42:31 -0800 Subject: Comment tylannitride SNF 2006-02-13 19:59:35: pump down failure Message-ID: seal replaced