Comment tylannitride SNF 2006-02-13 18:04:19: MFS alarms, low dep rate

hopcroft at snf.stanford.edu hopcroft at snf.stanford.edu
Mon Feb 13 18:04:21 PST 2006


NH3 MFS alarm caused run to abort at step 30 with message "NH3 LEAK". Tried again, no problem until step 115 (!), MFS alarm. Dep rate was lower than expected.




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