From tberg at snf.stanford.edu  Tue Jan  3 12:57:22 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 3 Jan 2006 12:57:22 -0800
Subject: Comment tylannitride SNF 2006-01-03 12:57:21: gases purged out
Message-ID: <mailman.790.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

Gases purged out to install blanks in VMB



From maurice at snf.stanford.edu  Tue Jan  3 17:42:14 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 3 Jan 2006 17:42:14 -0800
Subject: Shutdown tylannitride SNF 2006-01-03 17:42:13: first test:thicker than expected
Message-ID: <mailman.791.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

LONH378 for 00:30:00
expected 1100ang...deposited 1462ang
process pressure looked good
repeating test



From maurice at snf.stanford.edu  Wed Jan  4 13:15:48 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 4 Jan 2006 13:15:48 -0800
Subject: Shutdown tylannitride SNF 2006-01-03 17:42:13: first test:thicker than expected
Message-ID: <mailman.792.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

  Dep rate as expected



From maurice at snf.stanford.edu  Wed Jan  4 13:16:25 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 4 Jan 2006 13:16:25 -0800
Subject: Comment tylannitride SNF 2006-01-03 12:57:21: gases purged out
Message-ID: <mailman.793.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

logged



From maurice at snf.stanford.edu  Wed Jan  4 13:16:35 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 4 Jan 2006 13:16:35 -0800
Subject: Comment tylannitride SNF 2005-12-01 16:14:00: new dummies added
Message-ID: <mailman.794.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

logged



From gladys at snf.stanford.edu  Tue Jan 10 08:39:13 2006
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Tue, 10 Jan 2006 08:39:13 -0800
Subject: Problem tylannitride SNF 2006-01-10 08:39:11: MFS ERROR:08 - NH3 FLASHING
Message-ID: <mailman.795.1357938953.26006.tylannitride-pcs@snf.stanford.edu>




From tura at snf.stanford.edu  Sat Jan 14 21:48:49 2006
From: tura at snf.stanford.edu (tura at snf.stanford.edu)
Date: Sat, 14 Jan 2006 21:48:49 -0800
Subject: Comment tylannitride SNF 2006-01-14 21:48:49: MFS ERROR
Message-ID: <mailman.796.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

Gave MFS error in the backfill (last) step, but deposition looks good. 



From tberg at snf.stanford.edu  Mon Jan 23 06:29:51 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 23 Jan 2006 06:29:51 -0800
Subject: Comment tylannitride SNF 2006-01-14 21:48:49: MFS ERROR
Message-ID: <mailman.797.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

noted



From tberg at snf.stanford.edu  Mon Jan 23 06:30:00 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 23 Jan 2006 06:30:00 -0800
Subject: Problem tylannitride SNF 2006-01-10 08:39:11: MFS ERROR:08 - NH3 FLASHING
Message-ID: <mailman.798.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

noted



From lindaw at snf.stanford.edu  Mon Jan 23 11:45:29 2006
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Mon, 23 Jan 2006 11:45:29 -0800
Subject: Problem tylannitride SNF 2006-01-23 11:45:28: MFS alarm in pump10
Message-ID: <mailman.799.1357938953.26006.tylannitride-pcs@snf.stanford.edu>




From king at snf.stanford.edu  Tue Jan 24 21:08:35 2006
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Tue, 24 Jan 2006 21:08:35 -0800
Subject: Problem tylannitride SNF 2006-01-24 21:08:34: MFS alarm, nitride
Message-ID: <mailman.800.1357938953.26006.tylannitride-pcs@snf.stanford.edu>

When the tube pulled the NH3 alarm came on. Probably needs adjustment.