Shutdown tylannitride SNF 2006-01-03 17:42:13: first test:thicker than expected

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jan 3 17:42:14 PST 2006

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LONH378 for 00:30:00
expected 1100ang...deposited 1462ang
process pressure looked good
repeating test

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