Shutdown tylannitride SNF 2006-07-21 17:51:36: out of NH3
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Mon Jul 24 12:44:32 PDT 2006
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Comment tylannitride SNF 2006-06-13 01:14:23: process pressure 230mTorr
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Shutdown tylannitride SNF 2006-07-24 17:31:10: Temp reading 400
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Ammonia is flowing fine after pump change
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Comment tylannitride SNF 2006-06-13 01:14:23: process pressure 230mTorr
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Shutdown tylannitride SNF 2006-07-24 17:31:10: Temp reading 400
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