From tberg at snf.stanford.edu Thu Jun 1 06:46:28 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Jun 2006 06:46:28 -0700 Subject: Shutdown tylannitride SNF 2006-05-31 11:53:37: gate valve not opening Message-ID: resolved gate valve issue From maurice at snf.stanford.edu Thu Jun 1 10:57:52 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jun 2006 10:57:52 -0700 Subject: Shutdown tylannitride SNF 2006-06-01 10:57:51: failed leakcheck Message-ID: base is ok... .9mtorr but fails leakback From tberg at snf.stanford.edu Fri Jun 2 10:52:53 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 2 Jun 2006 10:52:53 -0700 Subject: Shutdown tylannitride SNF 2006-06-01 10:57:51: failed leakcheck Message-ID: Repaired leak From tberg at snf.stanford.edu Fri Jun 2 10:55:12 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 2 Jun 2006 10:55:12 -0700 Subject: Comment tylannitride SNF 2006-06-02 10:55:11: Replaced MFC Message-ID: Replaced DCS mfc and ran 1 hour coat program-observing From maurice at snf.stanford.edu Fri Jun 2 13:39:54 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Jun 2006 13:39:54 -0700 Subject: Shutdown tylannitride SNF 2006-05-25 14:42:22: DCS MFS not flowing Message-ID: DCS MFC replaced From maurice at snf.stanford.edu Fri Jun 2 13:42:44 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Jun 2006 13:42:44 -0700 Subject: Problem tylannitride SNF 2006-06-02 13:42:42: testing after DCS MFC replaced Message-ID: testing after DCS MFC replaced From maurice at snf.stanford.edu Fri Jun 2 17:57:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Jun 2006 17:57:01 -0700 Subject: Comment tylannitride SNF 2006-06-02 17:57:01: LONH378 refractive index high Message-ID: LONH378 refractive index 3.0 (normal is 2.3) Ran LONH378 program for 1.5 hr MFC stayed at setpoint From sanli at snf.stanford.edu Sun Jun 4 23:34:41 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Sun, 4 Jun 2006 23:34:41 -0700 Subject: Shutdown tylannitride SNF 2006-06-04 23:34:41: NH3 MFS ALARM Message-ID: From tberg at snf.stanford.edu Mon Jun 5 11:50:41 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Jun 2006 11:50:41 -0700 Subject: Shutdown tylannitride SNF 2006-06-04 23:34:41: NH3 MFS ALARM Message-ID: ran run ok From tberg at snf.stanford.edu Tue Jun 6 06:18:58 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Jun 2006 06:18:58 -0700 Subject: Comment tylannitride SNF 2006-06-02 10:55:11: Replaced MFC Message-ID: noted From tberg at snf.stanford.edu Tue Jun 6 06:19:18 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Jun 2006 06:19:18 -0700 Subject: Comment tylannitride SNF 2006-05-26 15:28:03: DCS MFC still not working Message-ID: noted mfc changed From tberg at snf.stanford.edu Tue Jun 6 06:19:41 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Jun 2006 06:19:41 -0700 Subject: Comment tylannitride SNF 2006-05-26 09:19:11: DCS flow problem Message-ID: noted From sanli at snf.stanford.edu Wed Jun 7 15:08:08 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Wed, 7 Jun 2006 15:08:08 -0700 Subject: Shutdown tylannitride SNF 2006-06-07 15:08:08: base pressure > 500 Message-ID: It cannot pass the leak check. It failed twice. From maurice at snf.stanford.edu Wed Jun 7 15:38:14 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jun 2006 15:38:14 -0700 Subject: Shutdown tylannitride SNF 2006-06-07 15:08:08: base pressure > 500 Message-ID: User reported that Ray did some magic. From sanda at snf.stanford.edu Tue Jun 13 01:14:23 2006 From: sanda at snf.stanford.edu (sanda at snf.stanford.edu) Date: Tue, 13 Jun 2006 01:14:23 -0700 Subject: Comment tylannitride SNF 2006-06-13 01:14:23: process pressure 230mTorr Message-ID: it used to br 290mTorr nitride2 From maurice at snf.stanford.edu Fri Jun 23 12:14:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 23 Jun 2006 12:14:01 -0700 Subject: Comment tylannitride SNF 2006-06-02 17:57:01: LONH378 refractive index high Message-ID: Last LONH378 run had RI of 2.421 normal is ~2.3 From maurice at snf.stanford.edu Fri Jun 23 12:14:49 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 23 Jun 2006 12:14:49 -0700 Subject: Problem tylannitride SNF 2006-06-02 13:42:42: testing after DCS MFC replaced Message-ID: pressure and growth rate are normal after DSC MFC replaced