Comment tylannitride SNF 2006-06-13 01:14:23: process pressure 230mTorr
sanda at snf.stanford.edu
sanda at snf.stanford.edu
Tue Jun 13 01:14:23 PDT 2006
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Shutdown tylannitride SNF 2006-06-07 15:08:08: base pressure > 500
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it used to br 290mTorr nitride2
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Shutdown tylannitride SNF 2006-06-07 15:08:08: base pressure > 500
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