From sanli at snf.stanford.edu Sat May 13 16:10:07 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Sat, 13 May 2006 16:10:07 -0700 Subject: Problem tylannitride SNF 2006-05-13 16:10:06: LONH378, DEP pressure too high, refractive index too high Message-ID: From tberg at snf.stanford.edu Mon May 22 07:46:18 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 May 2006 07:46:18 -0700 Subject: Shutdown tylannitride SNF 2006-05-22 07:46:18: Shutdown for water and air tie ins Message-ID: From tberg at snf.stanford.edu Mon May 22 09:03:55 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 May 2006 09:03:55 -0700 Subject: Shutdown tylannitride SNF 2006-05-22 07:46:18: Shutdown for water and air tie ins Message-ID: tie in completed From tberg at snf.stanford.edu Tue May 23 06:14:29 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 23 May 2006 06:14:29 -0700 Subject: Shutdown tylannitride SNF 2006-05-23 06:14:29: Pull and Clean Message-ID: From maurice at snf.stanford.edu Wed May 24 15:03:35 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 May 2006 15:03:35 -0700 Subject: Shutdown tylannitride SNF 2006-05-23 06:14:29: Pull and Clean Message-ID: pulled cleaned coated tested Ir ok dep rate ok From maurice at snf.stanford.edu Wed May 24 15:04:05 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 May 2006 15:04:05 -0700 Subject: Problem tylannitride SNF 2006-05-13 16:10:06: LONH378, DEP pressure too high, refractive index too high Message-ID: removed restriction from pumpline From maurice at snf.stanford.edu Wed May 24 17:07:15 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 May 2006 17:07:15 -0700 Subject: Shutdown tylannitride SNF 2006-05-24 17:07:15: No DCS flow in dep step Message-ID: From tberg at snf.stanford.edu Thu May 25 07:11:23 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 May 2006 07:11:23 -0700 Subject: Shutdown tylannitride SNF 2006-05-24 17:07:15: No DCS flow in dep step Message-ID: Ran DCs manually flowed fine From maurice at snf.stanford.edu Thu May 25 14:42:23 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 May 2006 14:42:23 -0700 Subject: Shutdown tylannitride SNF 2006-05-25 14:42:22: DCS MFS not flowing Message-ID: From seymour at snf.stanford.edu Fri May 26 09:19:14 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 May 2006 09:19:14 -0700 Subject: Comment tylannitride SNF 2006-05-26 09:19:11: DCS flow problem Message-ID: I rapped the heater tabe arfound MFC last eveningv. this morning I flowed 185 SCCM for 33 mins without any alarms. Over to Maurice for test. From lindaw at snf.stanford.edu Fri May 26 11:40:52 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 26 May 2006 11:40:52 -0700 Subject: Problem tylannitride SNF 2006-05-26 11:40:52: MFS ALARM Message-ID: From maurice at snf.stanford.edu Fri May 26 15:28:03 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 May 2006 15:28:03 -0700 Subject: Comment tylannitride SNF 2006-05-26 15:28:03: DCS MFC still not working Message-ID: Ran 2 runs From tberg at snf.stanford.edu Tue May 30 12:26:47 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 May 2006 12:26:47 -0700 Subject: Problem tylannitride SNF 2006-05-26 11:40:52: MFS ALARM Message-ID: n oted From maurice at snf.stanford.edu Wed May 31 11:53:38 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 31 May 2006 11:53:38 -0700 Subject: Shutdown tylannitride SNF 2006-05-31 11:53:37: gate valve not opening Message-ID: Tube in step 25 soft pump is on but gate is not open. There is a test run in the tube. It is being held in step 25