From tberg at snf.stanford.edu Wed Sep 6 07:24:11 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Sep 2006 07:24:11 -0700 Subject: Shutdown tylannitride SNF 2006-09-06 07:24:08: Not Pumping Message-ID: From seymour at snf.stanford.edu Thu Sep 7 14:24:30 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 Sep 2006 14:24:30 -0700 Subject: Shutdown tylannitride SNF 2006-09-06 07:24:08: Not Pumping Message-ID: replaced pump and tube. ran nitride1 with a time of 45 mins to coat tube. neeeds testing From seymour at snf.stanford.edu Thu Sep 7 14:24:52 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 Sep 2006 14:24:52 -0700 Subject: Shutdown tylannitride SNF 2006-09-07 14:24:51: needs test after repair. Message-ID: From maurice at snf.stanford.edu Thu Sep 7 17:31:03 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Sep 2006 17:31:03 -0700 Subject: Shutdown tylannitride SNF 2006-09-07 14:24:51: needs test after repair. Message-ID: test complete lonh378 00:30:00 front boat (c,t,b,r,l) 820, 833, 827, 837, 816 From latta at snf.stanford.edu Fri Sep 8 11:51:46 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 Sep 2006 11:51:46 -0700 Subject: Problem tylannitride SNF 2006-09-08 11:51:45: NH3 leak Message-ID: Wafers still in the tube.... From seymour at snf.stanford.edu Fri Sep 8 12:55:26 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Sep 2006 12:55:26 -0700 Subject: Problem tylannitride SNF 2006-09-08 11:51:45: NH3 leak Message-ID: checked NF3 flow and both were ok, no leaks found