From mdickey at snf.stanford.edu  Wed Apr  4 05:57:48 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 4 Apr 2007 05:57:48 -0700
Subject: Shutdown tylannitride SNF 2007-04-04 05:57:48: Tube pull
Message-ID: <mailman.921.1357938954.26006.tylannitride-pcs@snf.stanford.edu>

Down for pull and clean



From mdickey at snf.stanford.edu  Wed Apr  4 13:28:34 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 4 Apr 2007 13:28:34 -0700
Subject: Comment tylannitride SNF 2007-04-04 13:28:34: Coat and test
Message-ID: <mailman.922.1357938954.26006.tylannitride-pcs@snf.stanford.edu>

Pull and clean is done. Currently in coat recipe, will need
a test when finished



From maurice at snf.stanford.edu  Thu Apr  5 13:19:15 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 5 Apr 2007 13:19:15 -0700
Subject: Shutdown tylannitride SNF 2007-04-04 05:57:48: Tube pull
Message-ID: <mailman.923.1357938954.26006.tylannitride-pcs@snf.stanford.edu>

pulled ,cleaned,coated and test
Looks good



From maurice at snf.stanford.edu  Thu Apr  5 13:19:57 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 5 Apr 2007 13:19:57 -0700
Subject: Comment tylannitride SNF 2007-04-04 13:28:34: Coat and test
Message-ID: <mailman.924.1357938954.26006.tylannitride-pcs@snf.stanford.edu>

Nitride2  00:30:00
dep rate good



From tberg at snf.stanford.edu  Mon Apr 23 07:22:09 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 23 Apr 2007 07:22:09 -0700
Subject: Shutdown tylannitride SNF 2007-04-23 07:22:08: Cylinder Change
Message-ID: <mailman.925.1357938954.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue Apr 24 10:35:04 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 24 Apr 2007 10:35:04 -0700
Subject: Shutdown tylannitride SNF 2007-04-23 07:22:08: Cylinder Change
Message-ID: <mailman.926.1357938954.26006.tylannitride-pcs@snf.stanford.edu>

Partial cylinder put back on line due to new cylinder not having the correct connection. The proper connection cylinder is forthcomming



From mislam at snf.stanford.edu  Fri Apr 27 16:46:41 2007
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Fri, 27 Apr 2007 16:46:41 -0700
Subject: Problem tylannitride SNF 2007-04-27 16:46:41: MFS Alarm
Message-ID: <mailman.927.1357938954.26006.tylannitride-pcs@snf.stanford.edu>

Alarm during deposition, N2 LED was blinking