Problem tylannitride SNF 2007-04-27 16:46:41: MFS Alarm
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Fri Apr 27 16:46:41 PDT 2007
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Shutdown tylannitride SNF 2007-04-23 07:22:08: Cylinder Change
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Alarm during deposition, N2 LED was blinking
Previous message:
Shutdown tylannitride SNF 2007-04-23 07:22:08: Cylinder Change
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