From tberg at snf.stanford.edu Tue Jan 2 12:35:16 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Jan 2007 12:35:16 -0800 Subject: Comment tylannitride SNF 2007-01-02 12:35:16: Ran lonh378 for flow check Message-ID: From lindaw at snf.stanford.edu Tue Jan 2 14:36:10 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 2 Jan 2007 14:36:10 -0800 Subject: Comment tylannitride SNF 2007-01-02 14:36:10: TEMPL reading 400 at step 55 Message-ID: TEMPC reading 779.1 and TEMPS reading 784.0. Process running is NITRIDE2. From lindaw at snf.stanford.edu Tue Jan 2 14:43:12 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 2 Jan 2007 14:43:12 -0800 Subject: Comment tylannitride SNF 2007-01-02 14:43:12: step 65 TEMPL = 774.7B Message-ID: TCU% = 100.00 TEMPC & TEMPS ok. Gas flows ok. Process NITRIDE2 test run. From lindaw at snf.stanford.edu Tue Jan 2 15:34:40 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 2 Jan 2007 15:34:40 -0800 Subject: Comment tylannitride SNF 2007-01-02 15:34:39: NH3 MFC alarm step 110 Message-ID: Process NITRIDE2 From tberg at snf.stanford.edu Wed Jan 3 07:27:20 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 3 Jan 2007 07:27:20 -0800 Subject: Problem tylannitride SNF 2006-12-17 00:33:06: Process pressure HIGH Message-ID: pump changed From maurice at snf.stanford.edu Thu Jan 4 11:33:34 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Jan 2007 11:33:34 -0800 Subject: Shutdown tylannitride SNF 2007-01-04 11:33:33: No NH3 flow Message-ID: MFS alarm during deposition step 65. NH3 set point was 140 but flow was 0 From maurice at snf.stanford.edu Thu Jan 4 11:41:07 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Jan 2007 11:41:07 -0800 Subject: Shutdown tylannitride SNF 2007-01-04 11:33:33: No NH3 flow Message-ID: reset at bottle by Ray From maurice at snf.stanford.edu Thu Jan 4 11:42:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Jan 2007 11:42:17 -0800 Subject: Comment tylannitride SNF 2006-10-08 17:23:29: one dummy wafer is broken Message-ID: logged From maurice at snf.stanford.edu Thu Jan 4 11:42:34 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Jan 2007 11:42:34 -0800 Subject: Comment tylannitride SNF 2007-01-02 12:35:16: Ran lonh378 for flow check Message-ID: logged From maurice at snf.stanford.edu Thu Jan 4 15:32:09 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Jan 2007 15:32:09 -0800 Subject: Comment tylannitride SNF 2007-01-04 15:32:08: dummies added Message-ID: new dummies added From lindaw at snf.stanford.edu Mon Jan 15 13:23:31 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 15 Jan 2007 13:23:31 -0800 Subject: Problem tylannitride SNF 2007-01-15 13:23:29: tylan computer has some issues Message-ID: can't show status or load any programs into any tubes. On Saturday, it was noticed by Eric P that the computer was loading LPCVD programs into bank 1 (tylan 1 - 4), when the programs were loaded into the correct LPCVD tubes. I think the tylan computer has finally bought the farm. From mtang at snf.stanford.edu Tue Jan 16 09:13:46 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 16 Jan 2007 09:13:46 -0800 Subject: Shutdown tylannitride SNF 2007-01-16 09:13:45: Tycom problem Message-ID: From tberg at snf.stanford.edu Tue Jan 16 10:08:17 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Jan 2007 10:08:17 -0800 Subject: Shutdown tylannitride SNF 2007-01-16 09:13:45: Tycom problem Message-ID: working again From tberg at snf.stanford.edu Tue Jan 16 12:57:19 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Jan 2007 12:57:19 -0800 Subject: Problem tylannitride SNF 2007-01-15 13:23:29: tylan computer has some issues Message-ID: tycom is ok From mtang at snf.stanford.edu Thu Jan 18 09:15:49 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 18 Jan 2007 09:15:49 -0800 Subject: Shutdown tylannitride SNF 2007-01-18 09:15:44: Tycom problem Message-ID: From tberg at snf.stanford.edu Fri Jan 19 12:02:14 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Jan 2007 12:02:14 -0800 Subject: Shutdown tylannitride SNF 2007-01-18 09:15:44: Tycom problem Message-ID: TYCOM back up