Comment tylannitride SNF 2007-01-02 14:43:12: step 65 TEMPL = 774.7B

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Jan 2 14:43:12 PST 2007

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TCU% = 100.00
TEMPC & TEMPS ok.
Gas flows ok.
Process NITRIDE2  test run.

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