Shutdown tylannitride SNF 2007-01-04 11:33:33: No NH3 flow
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jan 4 11:41:07 PST 2007
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Shutdown tylannitride SNF 2007-01-04 11:33:33: No NH3 flow
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Comment tylannitride SNF 2006-10-08 17:23:29: one dummy wafer is broken
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reset at bottle by Ray
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Shutdown tylannitride SNF 2007-01-04 11:33:33: No NH3 flow
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Comment tylannitride SNF 2006-10-08 17:23:29: one dummy wafer is broken
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