From seymour at snf.stanford.edu Tue May 8 08:37:03 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 May 2007 08:37:03 -0700 Subject: Problem tylannitride SNF 2007-04-27 16:46:41: MFS Alarm Message-ID: checked discrete MFC zero after running autyo zero routine. From maurice at snf.stanford.edu Mon May 14 17:49:20 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2007 17:49:20 -0700 Subject: Shutdown tylannitride SNF 2007-05-14 17:49:20: Possible burn box issue Message-ID: From seymour at snf.stanford.edu Tue May 15 12:01:47 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 May 2007 12:01:47 -0700 Subject: Shutdown tylannitride SNF 2007-05-14 17:49:20: Possible burn box issue Message-ID: burnbox ok From maurice at snf.stanford.edu Tue May 15 14:20:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:20:28 -0700 Subject: Problem tylannitride SNF 2007-05-15 14:20:28: kicking out of pump program Message-ID: From shott at snf.stanford.edu Sat May 19 08:23:53 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 May 2007 08:23:53 -0700 Subject: Shutdown tylannitride SNF 2007-05-19 08:23:53: Needs restart after power failure ... Message-ID: From shott at snf.stanford.edu Sun May 20 09:59:24 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 20 May 2007 09:59:24 -0700 Subject: Shutdown tylannitride SNF 2007-05-19 08:23:53: Needs restart after power failure ... Message-ID: Eric P. restarted this tube ... John From maurice at snf.stanford.edu Mon May 21 11:44:34 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 May 2007 11:44:34 -0700 Subject: Problem tylannitride SNF 2007-05-15 14:20:28: kicking out of pump program Message-ID: have not seen problem in a days From kimsangb at snf.stanford.edu Fri May 25 21:39:34 2007 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 25 May 2007 21:39:34 -0700 Subject: Problem tylannitride SNF 2007-05-25 21:39:33: temperature sensors are unstable Message-ID: temperature reading for center is oscillating between 400 and 600 when the tube pulled out. From xzhuan1 at snf.stanford.edu Tue May 29 20:06:04 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 29 May 2007 20:06:04 -0700 Subject: Problem tylannitride SNF 2007-05-29 20:06:03: leak check failed Message-ID: failed leak check when running newlsn recipe. From xzhuan1 at snf.stanford.edu Wed May 30 13:43:22 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 30 May 2007 13:43:22 -0700 Subject: Shutdown tylannitride SNF 2007-05-30 13:43:22: falied leak check Message-ID: From mdickey at snf.stanford.edu Wed May 30 14:34:19 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2007 14:34:19 -0700 Subject: Shutdown tylannitride SNF 2007-05-30 13:43:22: falied leak check Message-ID: Did a manual leak check and everything is good...wet wafers? From seymour at snf.stanford.edu Wed May 30 14:52:48 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 May 2007 14:52:48 -0700 Subject: Problem tylannitride SNF 2007-05-29 20:06:03: leak check failed Message-ID: pumped tube down to base of 11 mTorr Rate of rise was about 5 mTorr per min. No leak problems found. trmoving problem From seymour at snf.stanford.edu Wed May 30 14:59:27 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 May 2007 14:59:27 -0700 Subject: Problem tylannitride SNF 2007-05-25 21:39:33: temperature sensors are unstable Message-ID: Temperature control requires the tube to be closed with no entry of room air to cool the profile t/c laying in the bottom of the tube. The recipes have a temp stabilization steps.