From lindaw at snf.stanford.edu Tue Apr 1 12:52:33 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 1 Apr 2008 12:52:33 -0700 Subject: Problem tylannitride SNF 2008-04-01 12:52:33: tube vented, pump10 won't run Message-ID: I noticed that the nitride tube was in ready mode, and that pump10 had been loaded. I checked reservations, and no one has it reserved. Tried to run pump10, but the program aborts. From seymour at snf.stanford.edu Tue Apr 1 13:14:13 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Apr 2008 13:14:13 -0700 Subject: Shutdown tylannitride SNF 2008-04-01 13:14:13: pump leaking Message-ID: From tberg at snf.stanford.edu Tue Apr 1 14:30:22 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Apr 2008 14:30:22 -0700 Subject: Comment tylannitride SNF 2008-04-01 14:30:20: Pump Bad Message-ID: Will Change tomorrow From tberg at snf.stanford.edu Wed Apr 2 14:10:14 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Apr 2008 14:10:14 -0700 Subject: Shutdown tylannitride SNF 2008-04-01 13:14:13: pump leaking Message-ID: Replaced pump, cleaned exhaust lines to burn box From tberg at snf.stanford.edu Wed Apr 2 14:10:25 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Apr 2008 14:10:25 -0700 Subject: Comment tylannitride SNF 2008-04-01 14:30:20: Pump Bad Message-ID: Replaced pump, cleaned exhaust lines to burn box From tberg at snf.stanford.edu Wed Apr 2 14:21:34 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Apr 2008 14:21:34 -0700 Subject: Comment tylannitride SNF 2008-04-02 14:21:33: Pumpdown and leak good needs test Message-ID: From maurice at snf.stanford.edu Wed Apr 2 16:08:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Apr 2008 16:08:58 -0700 Subject: Problem tylannitride SNF 2008-04-01 12:52:33: tube vented, pump10 won't run Message-ID: Replaced pump, cleaned exhaust lines to burn box From maurice at snf.stanford.edu Wed Apr 2 16:09:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Apr 2008 16:09:50 -0700 Subject: Problem tylannitride SNF 2008-04-02 16:09:44: Need test Message-ID: Replaced pump, cleaned exhaust lines to burn box From maurice at snf.stanford.edu Thu Apr 3 11:03:49 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Apr 2008 11:03:49 -0700 Subject: Comment tylannitride SNF 2008-04-03 11:03:48: New dummies added Message-ID: From maurice at snf.stanford.edu Thu Apr 3 11:04:16 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Apr 2008 11:04:16 -0700 Subject: Comment tylannitride SNF 2008-04-03 11:04:15: Running test after pump change Message-ID: From maurice at snf.stanford.edu Thu Apr 3 16:15:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Apr 2008 16:15:12 -0700 Subject: Comment tylannitride SNF 2008-04-03 11:04:15: Running test after pump change Message-ID: Run stopped at step 65. I aborted it and tried to run it again (without reloading it) and the said "Bad Recipe". I'll try to run it again tommorow. From maurice at snf.stanford.edu Fri Apr 4 13:36:32 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 13:36:32 -0700 Subject: Problem tylannitride SNF 2008-04-02 16:09:44: Need test Message-ID: Test after pump replaced. LONH378 00:30:00 expected 1050 actual 1135ang green light From maurice at snf.stanford.edu Fri Apr 4 13:37:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 13:37:55 -0700 Subject: Comment tylannitride SNF 2008-04-03 11:03:48: New dummies added Message-ID: logged From maurice at snf.stanford.edu Fri Apr 4 13:38:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 13:38:14 -0700 Subject: Comment tylannitride SNF 2008-04-02 14:21:33: Pumpdown and leak good needs test Message-ID: green light after good test From filip at snf.stanford.edu Mon Apr 7 20:39:28 2008 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 7 Apr 2008 20:39:28 -0700 Subject: Comment tylannitride SNF 2008-04-07 20:39:27: NEWLSN Message-ID: program gets stuck in step 65, and doesn't count down (this happened last week as well). Tried again, and worked fine. From maurice at snf.stanford.edu Tue Apr 15 14:12:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 Apr 2008 14:12:01 -0700 Subject: Shutdown tylannitride SNF 2008-04-15 14:12:01: Tube cold Message-ID: From seymour at snf.stanford.edu Tue Apr 15 14:49:51 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 Apr 2008 14:49:51 -0700 Subject: Comment tylannitride SNF 2008-04-15 14:49:50: reset TCU tube heating up Message-ID: I found the TCU to have an error message on the Tycom. After resetting the error cleared and the tube started to heat up to setpoint. From maurice at snf.stanford.edu Wed Apr 16 09:45:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Apr 2008 09:45:44 -0700 Subject: Shutdown tylannitride SNF 2008-04-15 14:12:01: Tube cold Message-ID: >From Ray: I found the TCU to have an error message on the Tycom. After resetting the error cleared and the tube started to heat up to setpoint. From maurice at snf.stanford.edu Wed Apr 16 17:49:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Apr 2008 17:49:20 -0700 Subject: Problem tylannitride SNF 2008-04-16 17:49:19: NewLSN stopped in step 65 Message-ID: Chen0622 reports that the Newlsn program stopped in step 65 on Tylannitride. Run was aborted and reloaded. It ran with no problems on the second try. From tberg at snf.stanford.edu Thu Apr 17 11:17:59 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Apr 2008 11:17:59 -0700 Subject: Comment tylannitride SNF 2008-04-17 11:17:59: Made new disk for Nitride Message-ID: From tberg at snf.stanford.edu Mon Apr 28 10:42:36 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Apr 2008 10:42:36 -0700 Subject: Comment tylannitride SNF 2008-04-07 20:39:27: NEWLSN Message-ID: Made New Nitride Disk it has run fine for several runs From tberg at snf.stanford.edu Mon Apr 28 10:42:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Apr 2008 10:42:50 -0700 Subject: Problem tylannitride SNF 2008-04-16 17:49:19: NewLSN stopped in step 65 Message-ID: Made New Nitride Disk it has run fine for several runs From tberg at snf.stanford.edu Mon Apr 28 10:42:58 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Apr 2008 10:42:58 -0700 Subject: Comment tylannitride SNF 2008-04-17 11:17:59: Made new disk for Nitride Message-ID: Made New Nitride Disk it has run fine for several runs From tberg at snf.stanford.edu Mon Apr 28 10:43:19 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Apr 2008 10:43:19 -0700 Subject: Comment tylannitride SNF 2008-04-15 14:49:50: reset TCU tube heating up Message-ID: Noted From karnold at snf.stanford.edu Mon Apr 28 18:11:33 2008 From: karnold at snf.stanford.edu (karnold at snf.stanford.edu) Date: Mon, 28 Apr 2008 18:11:33 -0700 Subject: Problem tylannitride SNF 2008-04-28 18:11:33: mfs alarm during NEWLSN depo Message-ID: During the deposition step (70) of NEWLSN, the tube showed NSF ALARM, and the light on the icon for the N2 flow controller that goes to the pump end of the tube was blinking. The process pressure and time remaining in deposition were fine, so I pressed alarm acknowledge and continued the run. the light on the flow controller icon went off