From jackson at snf.stanford.edu Fri Aug 8 22:53:34 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 8 Aug 2008 22:53:34 -0700 Subject: Problem tylannitride SNF 2008-08-08 22:53:33: door sticking Message-ID: takes a couple of tries to get door open...then first run through aborted...wouldn't pump down far enough. From jackson at snf.stanford.edu Sat Aug 9 00:24:45 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sat, 9 Aug 2008 00:24:45 -0700 Subject: Problem tylannitride SNF 2008-08-09 00:24:44: will not pump down and aborts PUMP10 Message-ID: tried 4 times From maryamzm at snf.stanford.edu Mon Aug 11 00:48:39 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Mon, 11 Aug 2008 00:48:39 -0700 Subject: Problem tylannitride SNF 2008-08-11 00:48:38: Pump problem Message-ID: tylannitride doesn't pump down at all (pressure reads 2000!) It aborts out of pump10, therefore it is sitting in atm right now. From maryamzm at snf.stanford.edu Mon Aug 11 01:05:36 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Mon, 11 Aug 2008 01:05:36 -0700 Subject: Shutdown tylannitride SNF 2008-08-11 01:05:34: Message-ID: See my comment From seymour at snf.stanford.edu Mon Aug 11 08:17:44 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:17:44 -0700 Subject: Comment tylannitride SNF 2008-08-11 08:17:44: tube not pumping Message-ID: found tube end has a chip out of it. Pulling the tube to all it to be repaired. locating another tube at this time. From seymour at snf.stanford.edu Wed Aug 13 09:13:31 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:13:31 -0700 Subject: Problem tylannitride SNF 2008-08-09 00:24:44: will not pump down and aborts PUMP10 Message-ID: replaced tube From seymour at snf.stanford.edu Wed Aug 13 09:13:50 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:13:50 -0700 Subject: Problem tylannitride SNF 2008-08-08 22:53:33: door sticking Message-ID: door working fine From seymour at snf.stanford.edu Wed Aug 13 09:14:06 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:14:06 -0700 Subject: Comment tylannitride SNF 2008-07-31 07:57:09: door issues Message-ID: door ok From seymour at snf.stanford.edu Wed Aug 13 09:14:29 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:14:29 -0700 Subject: Comment tylannitride SNF 2008-07-29 08:06:28: loader problems have been resolved Message-ID: loader is working as designed- From seymour at snf.stanford.edu Wed Aug 13 09:15:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:15:15 -0700 Subject: Comment tylannitride SNF 2008-07-30 20:57:52: some trouble Message-ID: ran nitride2 door opened as it should From seymour at snf.stanford.edu Wed Aug 13 09:15:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:15:57 -0700 Subject: Problem tylannitride SNF 2008-08-11 00:48:38: Pump problem Message-ID: tube pumped to 13 mT and leak rate was 4 mT/min From seymour at snf.stanford.edu Wed Aug 13 09:16:28 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:16:28 -0700 Subject: Shutdown tylannitride SNF 2008-08-11 01:05:34: Message-ID: replaced tube and am running Nitride2 to coat the tube From seymour at snf.stanford.edu Wed Aug 13 09:16:55 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:16:55 -0700 Subject: Comment tylannitride SNF 2008-08-11 08:17:44: tube not pumping Message-ID: tube pumping after repair From seymour at snf.stanford.edu Wed Aug 13 09:17:29 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Aug 2008 09:17:29 -0700 Subject: Problem tylannitride SNF 2008-08-13 09:17:28: coating tube after tube replaced Message-ID: tube will need a test when coat completed. From maurice at snf.stanford.edu Wed Aug 13 16:41:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Aug 2008 16:41:40 -0700 Subject: Problem tylannitride SNF 2008-08-13 09:17:28: coating tube after tube replaced Message-ID: LONH378 00:20:00 expected~1100 measured 1106 on wafer unif 2.1% system up! From tberg at snf.stanford.edu Thu Aug 14 13:38:39 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Aug 2008 13:38:39 -0700 Subject: Comment tylannitride SNF 2008-08-14 13:38:38: 110vac to bank gone Message-ID: replaced blown fuse From tberg at snf.stanford.edu Mon Aug 18 06:37:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:37:45 -0700 Subject: Comment tylannitride SNF 2008-08-14 13:38:38: 110vac to bank gone Message-ID: Replaced fuse checked operation From kwankyu at snf.stanford.edu Tue Aug 19 23:41:15 2008 From: kwankyu at snf.stanford.edu (kwankyu at snf.stanford.edu) Date: Tue, 19 Aug 2008 23:41:15 -0700 Subject: Problem tylannitride SNF 2008-08-19 23:41:14: Leak check failure Message-ID: Leak check failed twice. From kimsangb at snf.stanford.edu Wed Aug 20 21:32:57 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Wed, 20 Aug 2008 21:32:57 -0700 Subject: Problem tylannitride SNF 2008-08-20 21:32:52: Leak check failure Message-ID: I test-run 'NITRIDE2' recipe without wafers. Pressure was 13.1 at step 35 and pressure went up higher than 60 at step 40. It was automatically aborted to step 105. From mdickey at snf.stanford.edu Thu Aug 21 10:15:41 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 21 Aug 2008 10:15:41 -0700 Subject: Shutdown tylannitride SNF 2008-08-21 10:15:41: Leak rate Message-ID: Trouble shooting high leak rate From mdickey at snf.stanford.edu Thu Aug 21 10:57:39 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 21 Aug 2008 10:57:39 -0700 Subject: Shutdown tylannitride SNF 2008-08-21 10:15:41: Leak rate Message-ID: Tightened up ultra torre connection to the tube. Currently running a test. Base was at 13 m.t. and rate of rise was 10 m.t. before test. Running a program for testing. From maurice at snf.stanford.edu Thu Aug 21 11:41:35 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 21 Aug 2008 11:41:35 -0700 Subject: Problem tylannitride SNF 2008-08-20 21:32:52: Leak check failure Message-ID: Mike Tightened up ultra torre connection to the tube. System passed Nitride2 program leakcheck. From maurice at snf.stanford.edu Thu Aug 21 11:41:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 21 Aug 2008 11:41:42 -0700 Subject: Problem tylannitride SNF 2008-08-19 23:41:14: Leak check failure Message-ID: Mike Tightened up ultra torre connection to the tube. System passed Nitride2 program leakcheck. From kimsangb at snf.stanford.edu Fri Aug 22 17:25:05 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 22 Aug 2008 17:25:05 -0700 Subject: Problem tylannitride SNF 2008-08-22 17:25:03: MFS alarm at step 30 in nitride2 Message-ID: From tberg at snf.stanford.edu Mon Aug 25 08:37:26 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Aug 2008 08:37:26 -0700 Subject: Shutdown tylannitride SNF 2008-08-25 08:37:26: Leak Message-ID: Failing leak check for pumpdown From seymour at snf.stanford.edu Tue Aug 26 14:22:30 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Aug 2008 14:22:30 -0700 Subject: Shutdown tylannitride SNF 2008-08-25 08:37:26: Leak Message-ID: found tube pump port oring had failed. Removed tube and replaced tube gas ring orings and reassembled tube. Base pressure and leak rate good. putting to yellow for a test. From seymour at snf.stanford.edu Tue Aug 26 14:23:44 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Aug 2008 14:23:44 -0700 Subject: Problem tylannitride SNF 2008-08-26 14:23:43: tube pumping down ok at this time Message-ID: putting to yellow for a test From huimei at snf.stanford.edu Thu Aug 28 17:35:09 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Thu, 28 Aug 2008 17:35:09 -0700 Subject: Problem tylannitride SNF 2008-08-28 17:35:09: thickness variation large Message-ID: Nitride2: in the same bolt, thickness from 1149A~1432A From seymour at snf.stanford.edu Fri Aug 29 11:08:18 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Aug 2008 11:08:18 -0700 Subject: Shutdown tylannitride SNF 2008-08-29 11:08:18: changing ammonia cylinder Message-ID: From seymour at snf.stanford.edu Fri Aug 29 11:29:48 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Aug 2008 11:29:48 -0700 Subject: Shutdown tylannitride SNF 2008-08-29 11:08:18: changing ammonia cylinder Message-ID: cylinder changed From seymour at snf.stanford.edu Fri Aug 29 11:30:47 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Aug 2008 11:30:47 -0700 Subject: Problem tylannitride SNF 2008-08-29 11:30:41: May need test Message-ID: new ammonia cylinder installed on tool. From maurice at snf.stanford.edu Fri Aug 29 11:37:02 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Aug 2008 11:37:02 -0700 Subject: Shutdown tylannitride SNF 2008-08-29 11:37:02: running test Message-ID: running a test after bottle chabge From maurice at snf.stanford.edu Fri Aug 29 14:35:59 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Aug 2008 14:35:59 -0700 Subject: Shutdown tylannitride SNF 2008-08-29 11:37:02: running test Message-ID: rate and index rest looks good Nitride2 00:15:00 expected ~594 actual 630 IR=1.99 From maurice at snf.stanford.edu Fri Aug 29 14:36:08 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Aug 2008 14:36:08 -0700 Subject: Problem tylannitride SNF 2008-08-29 11:30:41: May need test Message-ID: ate and index rest looks good Nitride2 00:15:00 expected ~594 actual 630 IR=1.99 From maurice at snf.stanford.edu Fri Aug 29 14:38:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Aug 2008 14:38:17 -0700 Subject: Problem tylannitride SNF 2008-08-28 17:35:09: thickness variation large Message-ID: after bottle change rate and index look good Nitride2 00:15:00 expected ~594 actual 630 IR=1.99 From maurice at snf.stanford.edu Fri Aug 29 14:38:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Aug 2008 14:38:55 -0700 Subject: Problem tylannitride SNF 2008-08-26 14:23:43: tube pumping down ok at this time Message-ID: Pumping still looking good From ahryciw at snf.stanford.edu Sat Aug 30 10:39:11 2008 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Sat, 30 Aug 2008 10:39:11 -0700 Subject: Comment tylannitride SNF 2008-08-30 10:39:09: MFS alarm at step 30 Message-ID: MFS alarm is still going off at step 30. Pressing alarm ack resumed run apparently as normal. From ahryciw at snf.stanford.edu Sat Aug 30 11:54:11 2008 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Sat, 30 Aug 2008 11:54:11 -0700 Subject: Comment tylannitride SNF 2008-08-30 11:54:10: Total tally of MFS alarms Message-ID: 1 x during step 30 5 x during step 65 1 x during step 105 1 x during boat in after unloading wafers Pressed alarm ack to silence alarm and resume.