Problem tylannitride SNF 2008-08-13 09:17:28: coating tube after tube replaced

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Aug 13 16:41:40 PDT 2008

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LONH378  00:20:00
expected~1100
measured 1106
on wafer unif  2.1%
system up!

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