Problem tylannitride SNF 2008-08-20 21:32:52: Leak check failure

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Wed Aug 20 21:32:57 PDT 2008


I test-run 'NITRIDE2' recipe without wafers. Pressure was 13.1 at step 35 and pressure went up higher than 60 at step 40. It was automatically aborted to step 105.




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