Comment tylannitride SNF 2008-08-30 11:54:10: Total tally of MFS alarms

ahryciw at snf.stanford.edu ahryciw at snf.stanford.edu
Sat Aug 30 11:54:11 PDT 2008


1 x during step 30
5 x during step 65
1 x during step 105
1 x during boat in after unloading wafers
Pressed alarm ack to silence alarm and resume.




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