From gyama at snf.stanford.edu Fri Jan 18 10:44:02 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 18 Jan 2008 10:44:02 -0800 Subject: Problem tylannitride SNF 2008-01-18 10:44:02: failed leak chk twice, Message-ID: never got below PCRCPR 250 From gyama at snf.stanford.edu Fri Jan 18 11:32:16 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 18 Jan 2008 11:32:16 -0800 Subject: Shutdown tylannitride SNF 2008-01-18 11:32:15: Mike is checking Message-ID: From mdickey at snf.stanford.edu Fri Jan 18 14:06:51 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 18 Jan 2008 14:06:51 -0800 Subject: Comment tylannitride SNF 2008-01-18 14:06:50: Pump problem Message-ID: Possible pump and/or exhaust problem...looking into it From mdickey at snf.stanford.edu Tue Jan 22 13:19:20 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 22 Jan 2008 13:19:20 -0800 Subject: Comment tylannitride SNF 2008-01-22 13:19:20: Pump problem Message-ID: Put a gauge on the pump to troubleshoot. The base pressure is much lower but still high (78 m.t. vs. 120 m.t.) Currently purging under observation. From mdickey at snf.stanford.edu Wed Jan 23 11:52:41 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Jan 2008 11:52:41 -0800 Subject: Shutdown tylannitride SNF 2008-01-18 11:32:15: Mike is checking Message-ID: Pump replaced From mdickey at snf.stanford.edu Wed Jan 23 11:52:51 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Jan 2008 11:52:51 -0800 Subject: Problem tylannitride SNF 2008-01-18 10:44:02: failed leak chk twice, Message-ID: Pump replaced From mdickey at snf.stanford.edu Wed Jan 23 11:53:04 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Jan 2008 11:53:04 -0800 Subject: Comment tylannitride SNF 2008-01-18 14:06:50: Pump problem Message-ID: Pump replaced From mdickey at snf.stanford.edu Wed Jan 23 11:53:37 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Jan 2008 11:53:37 -0800 Subject: Comment tylannitride SNF 2008-01-22 13:19:20: Pump problem Message-ID: Pump replaced and part of exhaust line cleaned. Base at 1 m.t. / rate of rise at 20 m.t....ready for use Gary! From vincentcyw at snf.stanford.edu Thu Jan 24 18:13:18 2008 From: vincentcyw at snf.stanford.edu (vincentcyw at snf.stanford.edu) Date: Thu, 24 Jan 2008 18:13:18 -0800 Subject: Problem tylannitride SNF 2008-01-24 18:13:18: MFC alarm Message-ID: The furnace started an MFC alarm at step 115 for the recipe newlsn with the NH3 light flashing. I pressed alarm acknowledge but the alarm continues. From vincentcyw at snf.stanford.edu Thu Jan 24 18:24:06 2008 From: vincentcyw at snf.stanford.edu (vincentcyw at snf.stanford.edu) Date: Thu, 24 Jan 2008 18:24:06 -0800 Subject: Shutdown tylannitride SNF 2008-01-24 18:24:06: Nitride on furnace tube peeled off Message-ID: The furnace tube has brown spots, indicating nitride has been peeled off from the tube surface. Maurice looked at it and asked me to shut down the furnace. From mdickey at snf.stanford.edu Fri Jan 25 13:53:02 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 Jan 2008 13:53:02 -0800 Subject: Comment tylannitride SNF 2008-01-25 13:53:01: Test and Coat Message-ID: Tube pulled and system cleaned. Currently in coat program. Maurice to schedule a test needed after coat. From maurice at snf.stanford.edu Fri Jan 25 16:28:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Jan 2008 16:28:14 -0800 Subject: Comment tylannitride SNF 2008-01-25 13:53:01: Test and Coat Message-ID: coat complete. needs a test From maurice at snf.stanford.edu Fri Jan 25 16:28:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Jan 2008 16:28:50 -0800 Subject: Shutdown tylannitride SNF 2008-01-24 18:24:06: Nitride on furnace tube peeled off Message-ID: Tube pulled and system cleaned. Currently in coat program. Maurice to schedule a test needed after coat. From maurice at snf.stanford.edu Fri Jan 25 16:29:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Jan 2008 16:29:12 -0800 Subject: Problem tylannitride SNF 2008-01-24 18:13:18: MFC alarm Message-ID: Tube pulled and system cleaned. Currently in coat program. Maurice to schedule a test needed after coat. From maurice at snf.stanford.edu Fri Jan 25 16:30:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Jan 2008 16:30:46 -0800 Subject: Problem tylannitride SNF 2008-01-25 16:30:46: Need a test Message-ID: Tube pulled and system cleaned. System has been coated and need a test. Labmembers can use at their own risk. From filip at snf.stanford.edu Sat Jan 26 16:06:16 2008 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 26 Jan 2008 16:06:16 -0800 Subject: Comment tylannitride SNF 2008-01-26 16:06:15: dep. rate ok Message-ID: recipe NEWLSN time= 00:06:00 expected thickness = 500 A Nanospec gives 510+-5A C= 500, T= 511, B= 512, L= 516, R= 513 base P= 0 mT Leak P= 13.1 mT From maurice at snf.stanford.edu Mon Jan 28 16:18:36 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Jan 2008 16:18:36 -0800 Subject: Comment tylannitride SNF 2008-01-26 16:06:15: dep. rate ok Message-ID: logged From maurice at snf.stanford.edu Mon Jan 28 16:19:04 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Jan 2008 16:19:04 -0800 Subject: Problem tylannitride SNF 2008-01-25 16:30:46: Need a test Message-ID: Filip ran test: recipe NEWLSN time= 00:06:00 expected thickness = 500 A Nanospec gives 510+-5A C= 500, T= 511, B= 512, L= 516, R= 513 base P= 0 mT Leak P= 13.1 mT