Problem tylannitride SNF 2008-01-24 18:13:18: MFC alarm

vincentcyw at snf.stanford.edu vincentcyw at snf.stanford.edu
Thu Jan 24 18:13:18 PST 2008


The furnace started an MFC alarm at step 115 for the recipe newlsn with the NH3 light flashing. I pressed alarm acknowledge but the alarm continues.




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