Comment tylannitride SNF 2008-01-26 16:06:15: dep. rate ok

filip at snf.stanford.edu filip at snf.stanford.edu
Sat Jan 26 16:06:16 PST 2008


recipe NEWLSN
time= 00:06:00
expected thickness = 500 A
Nanospec gives 510+-5A
C= 500, T= 511, B= 512, L= 516, R= 513
base P= 0 mT
Leak P= 13.1 mT




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