From seymour at snf.stanford.edu Wed Jul 2 07:42:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 2 Jul 2008 07:42:15 -0700 Subject: Comment tylannitride SNF 2008-07-02 07:42:15: checking process pressure issue Message-ID: From seymour at snf.stanford.edu Wed Jul 2 15:32:36 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 2 Jul 2008 15:32:36 -0700 Subject: Shutdown tylannitride SNF 2008-07-02 15:32:36: process pressure issues Message-ID: From seymour at snf.stanford.edu Thu Jul 3 12:55:24 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 3 Jul 2008 12:55:24 -0700 Subject: Shutdown tylannitride SNF 2008-07-02 15:32:36: process pressure issues Message-ID: removed and cleaned baratron and t/c gage vacuum lines. replaced t/c gages and baratron. replaced pump and checked pump vacuum. The process pressure readout is not correct for the gas flows for newlsn recipe but the secondary readout shows the correct pressure. The MFS460 baratron reading is low. I am putting the tube to yellow. From seymour at snf.stanford.edu Thu Jul 3 12:56:10 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 3 Jul 2008 12:56:10 -0700 Subject: Comment tylannitride SNF 2008-07-02 07:42:15: checking process pressure issue Message-ID: replaced pump and baratron. From seymour at snf.stanford.edu Thu Jul 3 12:59:28 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 3 Jul 2008 12:59:28 -0700 Subject: Problem tylannitride SNF 2008-07-03 12:59:28: MFS 460 readout is too low. Message-ID: the gas flows for newlsn recipe produce the correct pressure readout on the secondary gage. Needs a test for thickness at this time. When tube clean is done I will clean out the baratron port in the gas ring which should eliminate process pressure errors. From king at snf.stanford.edu Thu Jul 3 19:28:58 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 3 Jul 2008 19:28:58 -0700 Subject: Problem tylannitride SNF 2008-07-03 19:28:58: Bank of LPCVDs appears dead Message-ID: No power to the front panels and pumps are off. It doesn't appear that any process gases were running at the time as no one else had a tube enabled. From king at snf.stanford.edu Thu Jul 3 19:36:19 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 3 Jul 2008 19:36:19 -0700 Subject: Shutdown tylannitride SNF 2008-07-03 19:36:18: power lost Message-ID: From shott at snf.stanford.edu Thu Jul 3 21:42:04 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 3 Jul 2008 21:42:04 -0700 Subject: Problem tylannitride SNF 2008-07-03 19:28:58: Bank of LPCVDs appears dead Message-ID: There appears to have been a power glitch that, somewhat surprisingly, took down the 3 Tylan banks. I believe that it occurred near 7:30 p.m. on Friday evening. By the time that I arrived at about 8:30, Eric had recovered most of the tubes with the exception of teos2 that seems to have trouble communicating to the TCU. It's reporting TCU error 4 sometimes and 5 at other times ... but no amount of resetting or reseating seems to clear the error. However, with this exception, it appears as if all of the other Tylan tubes are functional. Thanks, John From shott at snf.stanford.edu Thu Jul 3 21:42:21 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 3 Jul 2008 21:42:21 -0700 Subject: Shutdown tylannitride SNF 2008-07-03 19:36:18: power lost Message-ID: There appears to have been a power glitch that, somewhat surprisingly, took down the 3 Tylan banks. I believe that it occurred near 7:30 p.m. on Friday evening. By the time that I arrived at about 8:30, Eric had recovered most of the tubes with the exception of teos2 that seems to have trouble communicating to the TCU. It's reporting TCU error 4 sometimes and 5 at other times ... but no amount of resetting or reseating seems to clear the error. However, with this exception, it appears as if all of the other Tylan tubes are functional. Thanks, John From mtan at snf.stanford.edu Mon Jul 7 16:41:44 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 7 Jul 2008 16:41:44 -0700 Subject: Shutdown tylannitride SNF 2008-07-07 16:41:43: gate valve failed Message-ID: As read by Maurice, the gate valve failed to open. From maurice at snf.stanford.edu Tue Jul 8 15:55:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jul 2008 15:55:29 -0700 Subject: Shutdown tylannitride SNF 2008-07-07 16:41:43: gate valve failed Message-ID: Ted adjusted the door. From maurice at snf.stanford.edu Tue Jul 8 16:11:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jul 2008 16:11:44 -0700 Subject: Comment tylannitride SNF 2008-07-08 16:11:43: Nitride test Message-ID: Nitride2 00:15:00 process pressured displayed 143mtorr normally 185 expect 600Ang Actual 594 (pretty good) From vincentcyw at snf.stanford.edu Wed Jul 9 14:27:08 2008 From: vincentcyw at snf.stanford.edu (vincentcyw at snf.stanford.edu) Date: Wed, 9 Jul 2008 14:27:08 -0700 Subject: Problem tylannitride SNF 2008-07-09 14:27:07: Does not pump down Message-ID: Contacted Ray for this problem. Probably need to shut down the system From seymour at snf.stanford.edu Wed Jul 9 15:31:42 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 9 Jul 2008 15:31:42 -0700 Subject: Shutdown tylannitride SNF 2008-07-09 15:31:41: not passing leak test Message-ID: From seymour at snf.stanford.edu Thu Jul 10 08:26:38 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Jul 2008 08:26:38 -0700 Subject: Comment tylannitride SNF 2008-07-10 08:26:37: cooling down for a pull and clean Message-ID: From seymour at snf.stanford.edu Mon Jul 14 11:00:26 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:00:26 -0700 Subject: Shutdown tylannitride SNF 2008-07-09 15:31:41: not passing leak test Message-ID: leak check passed. tube is heating up ready for a coat. From seymour at snf.stanford.edu Mon Jul 14 11:00:47 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:00:47 -0700 Subject: Comment tylannitride SNF 2008-07-10 08:26:37: cooling down for a pull and clean Message-ID: pull and clean completed From seymour at snf.stanford.edu Mon Jul 14 11:01:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:01:15 -0700 Subject: Problem tylannitride SNF 2008-07-09 14:27:07: Does not pump down Message-ID: pumping now From seymour at snf.stanford.edu Mon Jul 14 11:02:13 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:02:13 -0700 Subject: Problem tylannitride SNF 2008-07-03 12:59:28: MFS 460 readout is too low. Message-ID: read out ok now From seymour at snf.stanford.edu Mon Jul 14 11:02:43 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:02:43 -0700 Subject: Comment tylannitride SNF 2008-07-08 16:11:43: Nitride test Message-ID: test over From seymour at snf.stanford.edu Mon Jul 14 11:04:26 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:04:26 -0700 Subject: Problem tylannitride SNF 2008-07-14 11:04:26: tube need a coat after pull and clean Message-ID: I am starting the NITRIDE 2 recipe for 45 mins to coat. From tberg at snf.stanford.edu Tue Jul 15 06:10:26 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 06:10:26 -0700 Subject: Problem tylannitride SNF 2008-07-14 11:04:26: tube need a coat after pull and clean Message-ID: Coat completed needs test From ccwan at snf.stanford.edu Tue Jul 15 13:02:40 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:02:40 -0700 Subject: Problem tylannitride SNF 2008-07-15 13:02:40: Not passing the leak test Message-ID: jumped from step 30 to 105. Tried twice but got no luck. From mtan at snf.stanford.edu Tue Jul 15 13:10:56 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:10:56 -0700 Subject: Problem tylannitride SNF 2008-07-15 13:10:55: failed leakage test Message-ID: Cannot progress further until the problem has been fixed. From tberg at snf.stanford.edu Tue Jul 15 14:18:29 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 14:18:29 -0700 Subject: Problem tylannitride SNF 2008-07-15 13:02:40: Not passing the leak test Message-ID: leak checked base pressure was 19mT leak 6 per minute From tberg at snf.stanford.edu Tue Jul 15 14:18:48 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 14:18:48 -0700 Subject: Problem tylannitride SNF 2008-07-15 13:10:55: failed leakage test Message-ID: leak checked base pressure was 19mT leak 6 per minute From kupnik at snf.stanford.edu Tue Jul 15 21:58:04 2008 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Tue, 15 Jul 2008 21:58:04 -0700 Subject: Problem tylannitride SNF 2008-07-15 21:58:03: there seems to be a door problem Message-ID: We tried twice to run nitride2, but it always jumped from step 35 to 105, i.e. it did not pass the leak check. Then, with the help of Eric P., we were able to pass the leak check. It seems when one slightly pushes the door after it boats in it is able to to pump down. From maurice at snf.stanford.edu Wed Jul 16 16:31:38 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jul 2008 16:31:38 -0700 Subject: Shutdown tylannitride SNF 2008-07-16 16:31:38: failing pump program Message-ID: From maurice at snf.stanford.edu Wed Jul 16 16:34:53 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jul 2008 16:34:53 -0700 Subject: Shutdown tylannitride SNF 2008-07-16 16:31:38: failing pump program Message-ID: had to push door hard to pump down From maurice at snf.stanford.edu Wed Jul 16 16:36:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jul 2008 16:36:12 -0700 Subject: Problem tylannitride SNF 2008-07-16 16:36:12: Push door firmly Message-ID: Door needs adjustment. Push door firmly once door closes or it will fail leakcheck. From mdickey at snf.stanford.edu Thu Jul 17 07:17:26 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 17 Jul 2008 07:17:26 -0700 Subject: Problem tylannitride SNF 2008-07-16 16:36:12: Push door firmly Message-ID: Made a door adjustment. Grabbed the door just fine in pump program. Will continue to monitor From seymour at snf.stanford.edu Fri Jul 18 07:44:02 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Jul 2008 07:44:02 -0700 Subject: Problem tylannitride SNF 2008-07-15 21:58:03: there seems to be a door problem Message-ID: Mike adjusted door From maurice at snf.stanford.edu Fri Jul 18 13:58:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jul 2008 13:58:26 -0700 Subject: Problem tylannitride SNF 2008-06-27 23:34:35: low process pressure Message-ID: clean out the baratron port in the gas ring tube pulled and cleaned From maurice at snf.stanford.edu Fri Jul 18 13:58:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jul 2008 13:58:37 -0700 Subject: Problem tylannitride SNF 2008-06-30 15:57:34: Process Pressure low Message-ID: clean out the baratron port in the gas ring tube pulled and cleaned From seymour at snf.stanford.edu Fri Jul 18 15:39:04 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Jul 2008 15:39:04 -0700 Subject: Shutdown tylannitride SNF 2008-07-18 15:39:04: gate valve leaking Message-ID: tube can not come up to atmospheric pressure to allow door to open. I shut down the pump and this allowed door to open. Vlave needs to be rebuilt. From seymour at snf.stanford.edu Mon Jul 21 10:11:12 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Jul 2008 10:11:12 -0700 Subject: Comment tylannitride SNF 2008-07-21 10:11:12: wet cleaning gate valve and I will rebuild it. Message-ID: From seymour at snf.stanford.edu Mon Jul 21 15:46:14 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:46:14 -0700 Subject: Shutdown tylannitride SNF 2008-07-18 15:39:04: gate valve leaking Message-ID: removed cleaned and rebuilt vacuun gate valve. checked loader operation and loader comes out when the nitride1 recipe was started. From tberg at snf.stanford.edu Tue Jul 22 13:29:08 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Jul 2008 13:29:08 -0700 Subject: Shutdown tylannitride SNF 2008-07-22 13:29:07: Bot issues won't pump down Message-ID: From seymour at snf.stanford.edu Tue Jul 22 15:49:27 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 Jul 2008 15:49:27 -0700 Subject: Comment tylannitride SNF 2008-07-22 15:49:26: tube has large leak Message-ID: I checked the pump line and it and the gate valve are good. I opened the element breaker and removed the T/C and sheath both look good. Loader had cable problem which necessated replacement. I will continue in the morning. From seymour at snf.stanford.edu Wed Jul 23 14:51:39 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 Jul 2008 14:51:39 -0700 Subject: Shutdown tylannitride SNF 2008-07-22 13:29:07: Bot issues won't pump down Message-ID: Cooled down and removed tube and redid the gas ring. Replaced flex line on gas ring. Replaced loader drive cable. reassembled tube and checked base and rate of rise. Both good. The tube is heating up to idle temp. I will put system to yellow for a test. From seymour at snf.stanford.edu Wed Jul 23 14:51:55 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 Jul 2008 14:51:55 -0700 Subject: Comment tylannitride SNF 2008-07-22 15:49:26: tube has large leak Message-ID: leak has been fixed. From seymour at snf.stanford.edu Wed Jul 23 14:52:21 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 Jul 2008 14:52:21 -0700 Subject: Comment tylannitride SNF 2008-07-21 10:11:12: wet cleaning gate valve and I will rebuild it. Message-ID: gate valve cleaned and rebuilt. From seymour at snf.stanford.edu Wed Jul 23 14:53:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 Jul 2008 14:53:57 -0700 Subject: Problem tylannitride SNF 2008-07-23 14:53:50: System needs test before release as up. Message-ID: Tube vacuum is good and loader is operating normally From dgunning at snf.stanford.edu Thu Jul 24 02:34:02 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 24 Jul 2008 02:34:02 -0700 Subject: Comment tylannitride SNF 2008-07-24 02:34:01: failed leak check Message-ID: out of desperation, i tried a test newlsn run. failed on first leak check - step 30/35 From seymour at snf.stanford.edu Thu Jul 24 15:26:56 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 24 Jul 2008 15:26:56 -0700 Subject: Shutdown tylannitride SNF 2008-07-24 15:26:55: door sealing issues Message-ID: From seymour at snf.stanford.edu Fri Jul 25 15:20:32 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Jul 2008 15:20:32 -0700 Subject: Shutdown tylannitride SNF 2008-07-24 15:26:55: door sealing issues Message-ID: Removed loader and replaced door seals. Put the tube back to gether and checked loader operation. I opened and then closed the door using nitride 1 recipe and checked the door sealed and the vacuum was good. I did this 4 times to verify operation. The tube needs a test after this work. I will put it to yellow. From seymour at snf.stanford.edu Fri Jul 25 15:22:14 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Jul 2008 15:22:14 -0700 Subject: Problem tylannitride SNF 2008-07-25 15:22:11: system needs a test after repair. Message-ID: The loader is operating correctly and the door is sealing when the loader goes in. A test is in order. From seymour at snf.stanford.edu Fri Jul 25 15:22:51 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Jul 2008 15:22:51 -0700 Subject: Problem tylannitride SNF 2008-07-23 14:53:50: System needs test before release as up. Message-ID: this one failed From seymour at snf.stanford.edu Fri Jul 25 15:23:14 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Jul 2008 15:23:14 -0700 Subject: Comment tylannitride SNF 2008-07-24 02:34:01: failed leak check Message-ID: its passing now From dgunning at snf.stanford.edu Tue Jul 29 04:51:44 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Tue, 29 Jul 2008 04:51:44 -0700 Subject: Problem tylannitride SNF 2008-07-29 04:51:43: furnace won't open Message-ID: this is second time i have tried to run a test.. first time the first leak check failed and this time the furnace wouldn't open. i ended pump program, waited between 10 and 15 minutes and tried to pull open but didn't work - seemed to be moving in when i press 'manual, fast, out'...?? reloaded pump program and tried again to same end. From seymour at snf.stanford.edu Tue Jul 29 08:01:03 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 29 Jul 2008 08:01:03 -0700 Subject: Problem tylannitride SNF 2008-07-29 04:51:43: furnace won't open Message-ID: found door flag beyond first sensor, so tube computer didn't know loader position. adjusted door flag and checked loader operation for closure and door in sensor activated. placed tube in pump recipe From seymour at snf.stanford.edu Tue Jul 29 08:03:46 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 29 Jul 2008 08:03:46 -0700 Subject: Problem tylannitride SNF 2008-07-25 15:22:11: system needs a test after repair. Message-ID: system ran on Saturday with no reported problems reported so this was the test I said was needed after repair. From seymour at snf.stanford.edu Tue Jul 29 08:06:30 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 29 Jul 2008 08:06:30 -0700 Subject: Comment tylannitride SNF 2008-07-29 08:06:28: loader problems have been resolved Message-ID: tube is functional at this time but has not had much use since being made available after pull and clean. From dgunning at snf.stanford.edu Tue Jul 29 23:39:16 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Tue, 29 Jul 2008 23:39:16 -0700 Subject: Comment tylannitride SNF 2008-07-29 23:39:15: mfs alarm sounded during step 115 Message-ID: pressed alarm ack to silence it and process continued apparently as normal From dgunning at snf.stanford.edu Wed Jul 30 20:57:53 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Wed, 30 Jul 2008 20:57:53 -0700 Subject: Comment tylannitride SNF 2008-07-30 20:57:52: some trouble Message-ID: door wouldn't open after pump program ended - maurice helped and i got wafers loaded and process started, then.. door didn't open at end of run - manually pulled to remove wafers and to close again. Not normal behaviour. From seymour at snf.stanford.edu Thu Jul 31 07:57:09 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 31 Jul 2008 07:57:09 -0700 Subject: Comment tylannitride SNF 2008-07-31 07:57:09: door issues Message-ID: found the loader flag past the first sensor, computer didn't know loader location. When out started the sensor then saw the flag and did a slow push. I readjusted the flag position to stop while in the first sensor.