Shutdown tylannitride SNF 2008-07-02 15:32:36: process pressure issues

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Jul 3 12:55:24 PDT 2008


removed and cleaned baratron and t/c gage vacuum lines. replaced t/c gages and baratron. replaced pump and checked pump vacuum. The process pressure readout is not correct for the gas flows for newlsn recipe but the secondary readout shows the correct pressure. The MFS460 baratron reading is low. I am putting the tube to yellow.




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