Problem tylannitride SNF 2008-07-03 12:59:28: MFS 460 readout is too low.

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Jul 3 12:59:28 PDT 2008


the gas flows for newlsn recipe produce the correct pressure readout on the secondary gage. Needs a test for thickness at this time. 
When tube clean is done I will clean out the baratron port in the gas ring which should eliminate process pressure errors.




More information about the tylannitride-pcs mailing list