Problem tylannitride SNF 2008-07-03 19:28:58: Bank of LPCVDs appears dead

king at snf.stanford.edu king at snf.stanford.edu
Thu Jul 3 19:28:58 PDT 2008


No power to the front panels and pumps are off.  It doesn't appear that any process gases were running at the time as no one else had a tube enabled. 




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