Comment tylannitride SNF 2008-07-08 16:11:43: Nitride test

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jul 8 16:11:44 PDT 2008


Nitride2    00:15:00  
process pressured displayed 143mtorr   normally 185
expect 600Ang  Actual 594 (pretty good)




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