Comment tylannitride SNF 2008-07-30 20:57:52: some trouble

dgunning at snf.stanford.edu dgunning at snf.stanford.edu
Wed Jul 30 20:57:53 PDT 2008


door wouldn't open after pump program ended - maurice helped and i got wafers loaded and process started, then..
door didn't open at end of run - manually pulled to remove wafers and to close again.  Not normal behaviour.




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