Comment tylannitride SNF 2008-05-06 08:21:52: N2Backfil MFS ALARM

seymour at seymour at
Tue May 6 08:21:54 PDT 2008

I checked the recipe and set the backfil MFC to flow setpoint of prior step to the alarm condition. It came up to the flow of 45 sccm and stayed constant. Acquiring the setpoint very quickly and then going to zero when shut off quickly. I did a auto zero routine and then returned the system to pump11.

More information about the tylannitride-pcs mailing list