Comment tylannitride SNF 2008-11-27 03:02:00: mfs460 alarm

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Thu Nov 27 03:02:00 PST 2008

Previous message: Problem tylannitride SNF 2008-11-25 05:37:26: mfs460 alarm during deposition
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at step 70
N2BKFL reads 1.2

Previous message: Problem tylannitride SNF 2008-11-25 05:37:26: mfs460 alarm during deposition
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