From seymour at snf.stanford.edu Fri Aug 7 14:44:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Aug 2009 14:44:41 -0700 Subject: Comment tylannitride SNF 2009-08-07 14:44:40: oil and filters changed Message-ID: From jrjain at snf.stanford.edu Thu Aug 13 06:22:53 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 13 Aug 2009 06:22:53 -0700 Subject: Problem tylannitride SNF 2009-08-13 06:22:53: Pump/Boat problem Message-ID: Tube still fails to reach pressure during Pump10. Also failed leak check during NITRIDE2. Re-ran recipe, holding the manual boat in buttons and pushing in on the boat to ensure a seal. Gate valve then opened and tube went to pressure. Not sure if this is a pump problem or a boat problem. Likely a boat problem as the manual push seemed to work. From seymour at snf.stanford.edu Thu Aug 13 08:19:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 13 Aug 2009 08:19:19 -0700 Subject: Problem tylannitride SNF 2009-08-13 06:22:53: Pump/Boat problem Message-ID: made some door adjustments. door seals when closed and loader hi torque completes. From cursive at snf.stanford.edu Sun Aug 23 15:47:25 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 23 Aug 2009 15:47:25 -0700 Subject: Problem tylannitride SNF 2009-08-23 15:47:24: One dummy wafer is broken Message-ID: From maurice at snf.stanford.edu Tue Aug 25 14:15:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Aug 2009 14:15:25 -0700 Subject: Problem tylannitride SNF 2009-08-23 15:47:24: One dummy wafer is broken Message-ID: broken wafer replaced