From tberg at snf.stanford.edu Mon Feb 2 05:59:21 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Feb 2009 05:59:21 -0800 Subject: Shutdown tylannitride SNF 2009-02-02 05:59:20: Pull and clean Message-ID: From seymour at snf.stanford.edu Tue Feb 3 09:44:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Feb 2009 09:44:58 -0800 Subject: Shutdown tylannitride SNF 2009-02-02 05:59:20: Pull and clean Message-ID: pull and clean completed. coat done From seymour at snf.stanford.edu Tue Feb 3 09:45:20 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Feb 2009 09:45:20 -0800 Subject: Problem tylannitride SNF 2009-02-03 09:45:20: beeds test after pull and clean Message-ID: From maurice at snf.stanford.edu Tue Feb 3 16:03:57 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Feb 2009 16:03:57 -0800 Subject: Problem tylannitride SNF 2009-02-03 09:45:20: beeds test after pull and clean Message-ID: Test complete NEWLSN 00:15:00 expected 1450 ang actually 1435ang From maurice at snf.stanford.edu Tue Feb 3 17:42:37 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Feb 2009 17:42:37 -0800 Subject: Problem tylannitride SNF 2009-01-29 15:44:35: User reports uniformity issues Message-ID: Don't see rings on wafers after tube pull. From skoh at snf.stanford.edu Wed Feb 4 15:23:19 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 4 Feb 2009 15:23:19 -0800 Subject: Problem tylannitride SNF 2009-02-04 15:23:18: Door interlock problem Message-ID: When the tube boats in, the door interlock signal does not turn ON - so recipe stays at step 10 - until we pushed the tube in a little. From skoh at snf.stanford.edu Wed Feb 4 17:54:18 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 4 Feb 2009 17:54:18 -0800 Subject: Problem tylannitride SNF 2009-02-04 17:54:18: MFS :08 Error Message-ID: Had this error during the last backfill step. From seymour at snf.stanford.edu Thu Feb 5 08:31:18 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Feb 2009 08:31:18 -0800 Subject: Problem tylannitride SNF 2009-02-04 15:23:18: Door interlock problem Message-ID: adjusted door in flag and pump tube down From seymour at snf.stanford.edu Thu Feb 5 08:33:35 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Feb 2009 08:33:35 -0800 Subject: Problem tylannitride SNF 2009-02-04 17:54:18: MFS :08 Error Message-ID: MFC not at zero, but gas not flowing, causing system to think there is a leak. From ahryciw at snf.stanford.edu Mon Feb 9 17:58:58 2009 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Mon, 9 Feb 2009 17:58:58 -0800 Subject: Shutdown tylannitride SNF 2009-02-09 17:58:58: Gate valve will not open Message-ID: Upon first running nitride2, the gross leak check (step 35) failed, accompanied by a loud rattling noise from the pumps. Maurice saw that the pump had turned off. He restarted it and we restarted nitride2. The gate valve did not open, and the pressure reading remained at 2000. I aborted and removed my wafers. From tberg at snf.stanford.edu Tue Feb 10 06:47:34 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 Feb 2009 06:47:34 -0800 Subject: Shutdown tylannitride SNF 2009-02-09 17:58:58: Gate valve will not open Message-ID: Ran pump10 recipe fine leak rate and pumpdown fine. Gate valve will not open if pump is off. From kenney at snf.stanford.edu Sat Feb 14 19:18:38 2009 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Sat, 14 Feb 2009 19:18:38 -0800 Subject: Problem tylannitride SNF 2009-02-14 19:18:37: PUMP10 quits Message-ID: I think the pump program fails the leak check. Tube is at atmosphere From ccchao1 at snf.stanford.edu Mon Feb 16 16:40:00 2009 From: ccchao1 at snf.stanford.edu (ccchao1 at snf.stanford.edu) Date: Mon, 16 Feb 2009 16:40:00 -0800 Subject: Problem tylannitride SNF 2009-02-16 16:39:59: PUMP10 cannot reach step 25 Message-ID: No deposition was done. From tberg at snf.stanford.edu Tue Feb 17 09:03:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2009 09:03:31 -0800 Subject: Problem tylannitride SNF 2009-02-14 19:18:37: PUMP10 quits Message-ID: PUmp 10 running for 3 hours no problem From tberg at snf.stanford.edu Tue Feb 17 09:04:23 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2009 09:04:23 -0800 Subject: Problem tylannitride SNF 2009-02-16 16:39:59: PUMP10 cannot reach step 25 Message-ID: Pump10 running for 3 hours no problem From seymour at snf.stanford.edu Tue Feb 17 09:05:51 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Feb 2009 09:05:51 -0800 Subject: Comment tylannitride SNF 2009-02-17 09:05:51: changed pump oil Message-ID: From elvislin at snf.stanford.edu Fri Feb 20 15:09:16 2009 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Fri, 20 Feb 2009 15:09:16 -0800 Subject: Problem tylannitride SNF 2009-02-20 15:09:16: previous user didn't run pump program Message-ID: when I try to end the pump program, I found out the previous user did load the pump program but didn't run it. The tube is under the risk of contamination. From latta at snf.stanford.edu Fri Feb 20 15:47:44 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Feb 2009 15:47:44 -0800 Subject: Problem tylannitride SNF 2009-02-20 15:47:44: Mystery! Message-ID: Prog PUPM10 gets to step 25 and puts itself into ready mode. Huh? From latta at snf.stanford.edu Fri Feb 20 15:49:23 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Feb 2009 15:49:23 -0800 Subject: Problem tylannitride SNF 2009-02-20 15:09:16: previous user didn't run pump program Message-ID: Actually, I spoke with the previous user and he did put the system in the PUMP10 progam. It kicked out at step25. I verified that by loading and trying to run the program... From maurice at snf.stanford.edu Fri Feb 20 16:08:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 Feb 2009 16:08:22 -0800 Subject: Shutdown tylannitride SNF 2009-02-20 16:08:21: system jumping out of pump program Message-ID: System pumps down during pump recipe. It sits in step 25 for 10 to 15 minutes. Then users report that it alarms and ends pump recipe. From latta at snf.stanford.edu Fri Feb 20 16:39:00 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Feb 2009 16:39:00 -0800 Subject: Shutdown tylannitride SNF 2009-02-20 16:08:21: system jumping out of pump program Message-ID: Taking out of shutdown in the hopes that the pump rpogram will hold. It has gone more than 15 mins. Boat assemly was manually extracted and replaced in tube. Door was gently nudgedto help seal. For now, seems to have done the trick, but it is under observation.... From latta at snf.stanford.edu Fri Feb 20 16:39:32 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Feb 2009 16:39:32 -0800 Subject: Problem tylannitride SNF 2009-02-20 15:47:44: Mystery! Message-ID: seems ok for now From skoh at snf.stanford.edu Fri Feb 20 17:35:42 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Fri, 20 Feb 2009 17:35:42 -0800 Subject: Problem tylannitride SNF 2009-02-20 17:35:41: Power Fail error Message-ID: I was sitting by the tycom, when i saw the the control panel of tylannitride beeping and flashing for a few seconds. The error showed on tycom is POWER FAIL. But soon after, things were back to normal - tube remains in step25 of the PUMP10 program. This is the second time I observed this today. From tberg at snf.stanford.edu Mon Feb 23 08:38:48 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Feb 2009 08:38:48 -0800 Subject: Shutdown tylannitride SNF 2009-02-23 08:38:48: Pump is dead Message-ID: From tberg at snf.stanford.edu Mon Feb 23 14:16:49 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Feb 2009 14:16:49 -0800 Subject: Comment tylannitride SNF 2009-02-23 14:16:48: Changing NH3 while system is down Message-ID: From tberg at snf.stanford.edu Tue Feb 24 14:11:06 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Feb 2009 14:11:06 -0800 Subject: Comment tylannitride SNF 2009-02-23 14:16:48: Changing NH3 while system is down Message-ID: Cylinder leak checked and changed From tberg at snf.stanford.edu Wed Feb 25 06:29:11 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 Feb 2009 06:29:11 -0800 Subject: Comment tylannitride SNF 2009-02-25 06:29:10: pump changed Message-ID: looking for leaks From seymour at snf.stanford.edu Wed Feb 25 13:22:14 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Feb 2009 13:22:14 -0800 Subject: Shutdown tylannitride SNF 2009-02-23 08:38:48: Pump is dead Message-ID: pump has been replaced. Removed tube and replaced with a cleaned one. Ran Nitride2 to coat the tube. needs test after repair. From maurice at snf.stanford.edu Wed Feb 25 14:53:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Feb 2009 14:53:22 -0800 Subject: Comment tylannitride SNF 2009-02-25 14:53:21: testing Message-ID: From maurice at snf.stanford.edu Wed Feb 25 15:10:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Feb 2009 15:10:46 -0800 Subject: Shutdown tylannitride SNF 2009-02-25 15:10:45: gate valve not opening Message-ID: system not pumping down From maurice at snf.stanford.edu Thu Feb 26 15:22:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 26 Feb 2009 15:22:07 -0800 Subject: Shutdown tylannitride SNF 2009-02-26 15:22:06: NH3/DCS interlock in dep step Message-ID: From seymour at snf.stanford.edu Thu Feb 26 15:36:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Feb 2009 15:36:36 -0800 Subject: Shutdown tylannitride SNF 2009-02-25 15:10:45: gate valve not opening Message-ID: tube was pumping when I got in to look at problem From seymour at snf.stanford.edu Thu Feb 26 15:38:03 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Feb 2009 15:38:03 -0800 Subject: Shutdown tylannitride SNF 2009-02-26 15:22:06: NH3/DCS interlock in dep step Message-ID: no ammonia or dichlor flow. found wire disconnected form the atm switch on the pump line. reattached and checked both flows and they rampped up to setpoint. From maurice at snf.stanford.edu Thu Feb 26 16:26:45 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 26 Feb 2009 16:26:45 -0800 Subject: Comment tylannitride SNF 2009-02-25 14:53:21: testing Message-ID: interlock error fixed be Ray. still needs test From seymour at snf.stanford.edu Fri Feb 27 14:48:39 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 27 Feb 2009 14:48:39 -0800 Subject: Comment tylannitride SNF 2009-02-27 14:48:39: I aborted the run in step 105 Message-ID: the controller was lockerd up in a leak alarm and would not respond to alarm silenance. There was no leak just the zero off on the N2 backfill mfc.