From maurice at snf.stanford.edu Tue Jan 6 10:01:38 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Jan 2009 10:01:38 -0800 Subject: Comment tylannitride SNF 2009-01-06 10:01:38: Needs a test after shutdown Message-ID: From maurice at snf.stanford.edu Tue Jan 6 17:46:52 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Jan 2009 17:46:52 -0800 Subject: Shutdown tylannitride SNF 2009-01-06 17:46:51: Test failed Message-ID: Ran NEWLSN 00:15:00 expected ~1500 ang Actual reading was out of range on both Nanospecs I didn't see flows or pressure during deposition step so I'll repeat the test tomorrow. (Ray or Ted could you check the DCS temp at the tank and manually flow it through the MFC...I don't think anything else changed on the system over the break...thanks -m) From maurice at snf.stanford.edu Wed Jan 7 13:38:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jan 2009 13:38:14 -0800 Subject: Shutdown tylannitride SNF 2009-01-06 17:46:51: Test failed Message-ID: Second test good NewLSN 00:15:00 expected ~1500 Ang Actual 1448 From maurice at snf.stanford.edu Wed Jan 7 13:38:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jan 2009 13:38:47 -0800 Subject: Comment tylannitride SNF 2009-01-06 10:01:38: Needs a test after shutdown Message-ID: Second test good NewLSN 00:15:00 expected ~1500 Ang Actual 1448 From maurice at snf.stanford.edu Wed Jan 7 13:39:20 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jan 2009 13:39:20 -0800 Subject: Problem tylannitride SNF 2008-11-25 05:37:26: mfs460 alarm during deposition Message-ID: no alarm durring my dep From lindaw at snf.stanford.edu Wed Jan 14 12:33:09 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 14 Jan 2009 12:33:09 -0800 Subject: Comment tylannitride SNF 2009-01-14 12:33:09: mfs error 08 in step 70 Message-ID: From shott at snf.stanford.edu Tue Jan 20 07:46:44 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:46:44 -0800 Subject: Comment tylannitride SNF 2008-06-23 06:24:54: MFS Alarm NEWLSN Step 115 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:46:49 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:46:49 -0800 Subject: Comment tylannitride SNF 2008-10-01 11:11:35: rezeroed n2 mfcs Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:46:55 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:46:55 -0800 Subject: Comment tylannitride SNF 2008-10-09 11:14:39: temp cal from 550 to 850 completed Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:00 -0800 Subject: Comment tylannitride SNF 2008-10-14 16:14:13: NITRIDE2 recipe modified Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:05 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:05 -0800 Subject: Comment tylannitride SNF 2008-10-14 16:30:17: LONH378 modified Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:10 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:10 -0800 Subject: Comment tylannitride SNF 2008-10-15 08:08:56: found system ready with nitride2 loaded Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:27 -0800 Subject: Comment tylannitride SNF 2008-10-16 14:11:27: modified NEWLSN Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:32 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:32 -0800 Subject: Comment tylannitride SNF 2008-11-13 00:28:10: MFS460 alarm Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:47:38 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:47:38 -0800 Subject: Comment tylannitride SNF 2008-11-27 03:02:00: mfs460 alarm Message-ID: To the archives ... From maurice at snf.stanford.edu Thu Jan 29 15:44:36 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Jan 2009 15:44:36 -0800 Subject: Problem tylannitride SNF 2009-01-29 15:44:35: User reports uniformity issues Message-ID: Three sets of rings on wafers after dep. User has not yet measured wafers. Also reported a MFS alarm during deposition.