Shutdown tylannitride SNF 2009-01-06 17:46:51: Test failed

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jan 6 17:46:52 PST 2009


Ran NEWLSN  00:15:00
expected ~1500 ang
Actual reading was out of range on both Nanospecs
I didn't see flows or pressure during deposition step so I'll repeat the test tomorrow.
(Ray or Ted could you check the DCS temp at the tank and manually flow it through the MFC...I don't think anything else changed on the system over the break...thanks  -m)




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