Problem tylannitride SNF 2009-01-29 15:44:35: User reports uniformity issues

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jan 29 15:44:36 PST 2009

Previous message: Comment tylannitride SNF 2008-11-27 03:02:00: mfs460 alarm
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Three sets of rings on wafers after dep.  User has not yet  measured wafers.
Also reported a MFS alarm during deposition.

Previous message: Comment tylannitride SNF 2008-11-27 03:02:00: mfs460 alarm
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