From tberg at snf.stanford.edu Wed Jul 1 06:27:13 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Jul 2009 06:27:13 -0700 Subject: Comment tylannitride SNF 2009-07-01 06:27:12: Checked flows and temp Message-ID: Checked flows and temp. all looks ok From seymour at snf.stanford.edu Wed Jul 1 13:28:27 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Jul 2009 13:28:27 -0700 Subject: Shutdown tylannitride SNF 2009-07-01 13:28:27: out of ammonia. Message-ID: and loader sherath broken. From seymour at snf.stanford.edu Wed Jul 1 15:59:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Jul 2009 15:59:01 -0700 Subject: Shutdown tylannitride SNF 2009-07-01 13:28:27: out of ammonia. Message-ID: ammonia cylinder being installed. From seymour at snf.stanford.edu Wed Jul 1 16:00:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Jul 2009 16:00:16 -0700 Subject: Problem tylannitride SNF 2009-07-01 16:00:16: system heating up and asmmonia being changed Message-ID: when ammonia line is ready for service the tool can be run. From king at snf.stanford.edu Wed Jul 1 17:19:00 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 1 Jul 2009 17:19:00 -0700 Subject: Comment tylannitride SNF 2009-07-01 17:18:59: Clarification Message-ID: Hi, could you please clarify the last problem report regarding when or if ammonia is ready and the system can be tested? It's not a rush but I'm unsure what was meant. Thanks. From maurice at snf.stanford.edu Thu Jul 2 17:10:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:10:29 -0700 Subject: Problem tylannitride SNF 2009-07-01 16:00:16: system heating up and asmmonia being changed Message-ID: Keven Huang ran NEWLSN and got ~5700 Based on last tube qual we expected 5652 Ang From maurice at snf.stanford.edu Thu Jul 2 17:11:37 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:11:37 -0700 Subject: Comment tylannitride SNF 2009-07-01 17:18:59: Clarification Message-ID: Ammonia on system tested green light From maurice at snf.stanford.edu Thu Jul 2 17:12:54 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:12:54 -0700 Subject: Problem tylannitride SNF 2009-06-30 20:33:08: no nitride on Si after deposition Message-ID: ammonia changed, shealth repaired From king at snf.stanford.edu Thu Jul 2 22:28:41 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 2 Jul 2009 22:28:41 -0700 Subject: Problem tylannitride SNF 2009-07-02 22:28:40: Gate valve not opening Message-ID: It also failed for Kevin Huang's run earlier today. From king at snf.stanford.edu Fri Jul 3 01:33:05 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 3 Jul 2009 01:33:05 -0700 Subject: Problem tylannitride SNF 2009-07-03 01:33:04: Door/pumpdown problem Message-ID: It turns out the door isn't closing well enough and you have to hold it in for the soft pump, even though it appears sealed. So, this probably wasn't actually a gate valve problem as someone thought earlier, but that the soft pump pressure didn't get low enough to kick in the gate valve. I wasn't able to get my wafers through so please delete any charges for nitride and wbdiff, thanks. From kevhuang at snf.stanford.edu Sun Jul 5 23:25:25 2009 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sun, 5 Jul 2009 23:25:25 -0700 Subject: Comment tylannitride SNF 2009-07-05 23:25:25: gate valve not opening issue Message-ID: When I ran it, the first time the gate valve didn't open. I retried without pulling out the tube and it went through the 2nd time. so this looks like an intermitten problem. From seymour at snf.stanford.edu Mon Jul 6 11:41:21 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Jul 2009 11:41:21 -0700 Subject: Problem tylannitride SNF 2009-07-03 01:33:04: Door/pumpdown problem Message-ID: adjusted door and checked operation From seymour at snf.stanford.edu Mon Jul 6 11:41:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Jul 2009 11:41:44 -0700 Subject: Comment tylannitride SNF 2009-07-05 23:25:25: gate valve not opening issue Message-ID: gate vlave operating normally From seymour at snf.stanford.edu Mon Jul 6 11:41:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Jul 2009 11:41:58 -0700 Subject: Problem tylannitride SNF 2009-07-02 22:28:40: Gate valve not opening Message-ID: door not sealing From ywidjaja at snf.stanford.edu Sat Jul 11 04:45:58 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 11 Jul 2009 04:45:58 -0700 Subject: Problem tylannitride SNF 2009-07-11 04:45:57: Unable to run pump10 Message-ID: From tberg at snf.stanford.edu Mon Jul 13 06:41:01 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Jul 2009 06:41:01 -0700 Subject: Shutdown tylannitride SNF 2009-07-13 06:41:00: Broken TC sheath Message-ID: From seymour at snf.stanford.edu Mon Jul 13 14:15:10 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Jul 2009 14:15:10 -0700 Subject: Shutdown tylannitride SNF 2009-07-13 06:41:00: Broken TC sheath Message-ID: replaced broken t/c sheath. adjusted loader. did cold and hot leak check. base and leak check good. From seymour at snf.stanford.edu Mon Jul 13 14:16:07 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Jul 2009 14:16:07 -0700 Subject: Problem tylannitride SNF 2009-07-11 04:45:57: Unable to run pump10 Message-ID: t/c sheath broken, I replaced it From seymour at snf.stanford.edu Mon Jul 13 14:16:24 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Jul 2009 14:16:24 -0700 Subject: Problem tylannitride SNF 2009-07-13 14:16:23: needs test after repair. Message-ID: From maurice at snf.stanford.edu Thu Jul 16 14:25:19 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 16 Jul 2009 14:25:19 -0700 Subject: Problem tylannitride SNF 2009-07-13 14:16:23: needs test after repair. Message-ID: Test complete Newlsn 00:15:00 expected `1400 actual 1154 Dep rate a lttle lower than previous test From tberg at snf.stanford.edu Fri Jul 17 06:03:01 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 17 Jul 2009 06:03:01 -0700 Subject: Comment tylannitride SNF 2009-07-01 06:27:12: Checked flows and temp Message-ID: noted From jrjain at snf.stanford.edu Sat Jul 18 18:05:50 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sat, 18 Jul 2009 18:05:50 -0700 Subject: Comment tylannitride SNF 2009-07-18 18:05:49: Tube left out for long time Message-ID: Pushed tube back in and pumped down. User's wafers are still inside. From tberg at snf.stanford.edu Mon Jul 20 06:57:47 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Jul 2009 06:57:47 -0700 Subject: Shutdown tylannitride SNF 2009-07-20 06:57:47: Will not pump Message-ID: From tberg at snf.stanford.edu Mon Jul 20 12:30:25 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Jul 2009 12:30:25 -0700 Subject: Comment tylannitride SNF 2009-07-20 12:30:24: Gas Ring is out for repair Message-ID: Gas Ring is out for repair. Should be back later this week From seymour at snf.stanford.edu Thu Jul 23 11:34:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Jul 2009 11:34:01 -0700 Subject: Shutdown tylannitride SNF 2009-07-20 06:57:47: Will not pump Message-ID: sent gas ring to vendor for reconditioning. Reassempled the system and it is heating up now. will need a test after repair. From seymour at snf.stanford.edu Thu Jul 23 11:34:24 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Jul 2009 11:34:24 -0700 Subject: Comment tylannitride SNF 2009-07-20 12:30:24: Gas Ring is out for repair Message-ID: gas riing returned and installed. From seymour at snf.stanford.edu Thu Jul 23 11:34:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Jul 2009 11:34:41 -0700 Subject: Comment tylannitride SNF 2009-07-18 18:05:49: Tube left out for long time Message-ID: noted From seymour at snf.stanford.edu Thu Jul 23 11:35:07 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Jul 2009 11:35:07 -0700 Subject: Problem tylannitride SNF 2009-07-23 11:35:06: needs test after repair. Message-ID: From rshyam at snf.stanford.edu Fri Jul 24 05:45:16 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 24 Jul 2009 05:45:16 -0700 Subject: Problem tylannitride SNF 2009-07-24 05:45:15: Middle thermocouple 'b' Message-ID: From seymour at snf.stanford.edu Fri Jul 24 07:50:03 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:50:03 -0700 Subject: Problem tylannitride SNF 2009-07-24 05:45:15: Middle thermocouple 'b' Message-ID: removed the "b" from the display From seymour at snf.stanford.edu Fri Jul 24 07:50:49 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:50:49 -0700 Subject: Problem tylannitride SNF 2009-07-23 11:35:06: needs test after repair. Message-ID: From yeh at snf.stanford.edu Mon Jul 27 10:29:00 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 27 Jul 2009 10:29:00 -0700 Subject: Problem tylannitride SNF 2009-07-27 10:29:00: SRD leaving water droplets on wafers Message-ID: full boat of wafers. dry cycle is currently at 240sec, 1800 rpm per instruction manual. From tberg at snf.stanford.edu Mon Jul 27 11:58:17 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jul 2009 11:58:17 -0700 Subject: Problem tylannitride SNF 2009-07-27 10:29:00: SRD leaving water droplets on wafers Message-ID: Please do not shut down furnace when there is a problem with SRD!!! From yeh at snf.stanford.edu Mon Jul 27 14:13:14 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 27 Jul 2009 14:13:14 -0700 Subject: Problem tylannitride SNF 2009-07-27 14:13:13: nitride tube not venting Message-ID: finished running "NITRIDE2" recipe 15 minutes ago & temp @ ~550C but tube did not open. can not open tube manually either. From seymour at snf.stanford.edu Mon Jul 27 14:30:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Jul 2009 14:30:47 -0700 Subject: Shutdown tylannitride SNF 2009-07-27 14:30:47: gate valve leaking. Message-ID: From seymour at snf.stanford.edu Mon Jul 27 15:42:35 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Jul 2009 15:42:35 -0700 Subject: Problem tylannitride SNF 2009-07-27 14:13:13: nitride tube not venting Message-ID: tube vents after repair From seymour at snf.stanford.edu Mon Jul 27 15:45:14 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Jul 2009 15:45:14 -0700 Subject: Shutdown tylannitride SNF 2009-07-27 14:30:47: gate valve leaking. Message-ID: removed tube gate valve and rebuilt it. checked base and leak rate and they were good. Waited 10 mins with 3 liters N2 flow ( what the recipe calls for for that time) and opened tube in manual. Closed and started pump10. From seymour at snf.stanford.edu Wed Jul 29 09:15:07 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jul 2009 09:15:07 -0700 Subject: Comment tylannitride SNF 2009-07-29 09:15:06: oil and filter change Message-ID: From ludwig at snf.stanford.edu Wed Jul 29 15:02:16 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Wed, 29 Jul 2009 15:02:16 -0700 Subject: Problem tylannitride SNF 2009-07-29 15:02:16: vaccum tip broke Message-ID: the non-metal vaccum tip broke , replaced with AG4100 Tx. Ludwig From seymour at snf.stanford.edu Wed Jul 29 15:11:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jul 2009 15:11:45 -0700 Subject: Problem tylannitride SNF 2009-07-29 15:02:16: vaccum tip broke Message-ID: vacuum wand tip replaced