Problem tylannitride SNF 2009-07-03 01:33:04: Door/pumpdown problem

[king at snf.stanford.edu]

It turns out the door isn't closing well enough and you have to hold it in for the soft pump, even though it appears sealed.   So, this probably wasn't actually a gate valve problem as someone thought earlier, but that the soft pump pressure didn't get low enough to kick in the gate valve.   
I wasn't able to get my wafers through so please delete any charges for nitride and wbdiff, thanks.