From lindaw at snf.stanford.edu Tue Jun 2 11:33:05 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 2 Jun 2009 11:33:05 -0700 Subject: Problem tylannitride SNF 2009-06-02 11:33:04: pump10 won't run, ends with alarm Message-ID: While I was monitoring the poly tube, pump10 running on tube 10 alarmed and ended by itself. I tried running pump10 again, and after a few minutes, it alarmed and ended again. Will try running a third time. From tberg at snf.stanford.edu Wed Jun 3 09:07:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 3 Jun 2009 09:07:39 -0700 Subject: Problem tylannitride SNF 2009-06-02 11:33:04: pump10 won't run, ends with alarm Message-ID: Added oil to pump checked leak rate ran pump 10 ok From tberg at snf.stanford.edu Wed Jun 3 09:07:57 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 3 Jun 2009 09:07:57 -0700 Subject: Comment tylannitride SNF 2009-05-15 15:08:28: oil change completed Message-ID: noted From cursive at snf.stanford.edu Wed Jun 3 13:43:53 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 3 Jun 2009 13:43:53 -0700 Subject: Problem tylannitride SNF 2009-06-03 13:43:52: one dummy wafer broken Message-ID: one dummy wafer broken. I removed it. From seymour at snf.stanford.edu Fri Jun 5 15:00:06 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Jun 2009 15:00:06 -0700 Subject: Comment tylannitride SNF 2009-06-05 15:00:06: added pump oil Message-ID: From jprovine at snf.stanford.edu Sat Jun 6 16:53:04 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 6 Jun 2009 16:53:04 -0700 Subject: Comment tylannitride SNF 2009-06-06 16:53:03: TEMPL reading 400 all the time Message-ID: running nitride2, TEMPL gives 400.0C throughout run and has TCU of 12%. this means the tube does not cool down before venting after deposition but vents to atmosphere and comes out HOT, ie > 725C according to TEMPC and TEMPS. i'll measure my wafers as soon as they come out and cool down. to see if it affected deposition or not and comment that result. From jprovine at snf.stanford.edu Sat Jun 6 17:15:59 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 6 Jun 2009 17:15:59 -0700 Subject: Comment tylannitride SNF 2009-06-06 17:15:58: TEMPL reading 400.0C at all times Message-ID: this is true for pump11 program also. no trouble with my film thickness and good uniformity throughout the center boat (only one i ran). most likely a thermocouple problem not an actual heater problem...but beware because the cooldown step only take TEMPL into account and thus ends immediately. wafers come out much closer to 725C than 600C desired by the program. From tberg at snf.stanford.edu Mon Jun 8 06:39:51 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Jun 2009 06:39:51 -0700 Subject: Comment tylannitride SNF 2009-06-06 16:53:03: TEMPL reading 400 all the time Message-ID: Repaired TC connection From tberg at snf.stanford.edu Mon Jun 8 06:40:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Jun 2009 06:40:03 -0700 Subject: Comment tylannitride SNF 2009-06-06 17:15:58: TEMPL reading 400.0C at all times Message-ID: Repaired TC connection From tberg at snf.stanford.edu Mon Jun 8 06:40:17 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Jun 2009 06:40:17 -0700 Subject: Shutdown tylannitride SNF 2009-06-08 06:40:17: Pump is bad Message-ID: From tberg at snf.stanford.edu Mon Jun 8 13:40:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Jun 2009 13:40:12 -0700 Subject: Shutdown tylannitride SNF 2009-06-08 06:40:17: Pump is bad Message-ID: replaced pump From tberg at snf.stanford.edu Mon Jun 8 13:40:41 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Jun 2009 13:40:41 -0700 Subject: Shutdown tylannitride SNF 2009-06-08 13:40:40: tube is dusted down for pull and clean Message-ID: From seymour at snf.stanford.edu Wed Jun 10 12:23:30 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Jun 2009 12:23:30 -0700 Subject: Shutdown tylannitride SNF 2009-06-08 13:40:40: tube is dusted down for pull and clean Message-ID: tube cleaned. leak check passed. running coat recipe. will need test after coat. From seymour at snf.stanford.edu Wed Jun 10 12:24:05 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Jun 2009 12:24:05 -0700 Subject: Problem tylannitride SNF 2009-06-03 13:43:52: one dummy wafer broken Message-ID: tube cleaned and coat runniing From seymour at snf.stanford.edu Wed Jun 10 12:24:21 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Jun 2009 12:24:21 -0700 Subject: Comment tylannitride SNF 2009-06-05 15:00:06: added pump oil Message-ID: noted From seymour at snf.stanford.edu Wed Jun 10 12:24:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Jun 2009 12:24:41 -0700 Subject: Problem tylannitride SNF 2009-06-10 12:24:40: needs test after coat Message-ID: From maurice at snf.stanford.edu Wed Jun 10 17:40:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Jun 2009 17:40:48 -0700 Subject: Problem tylannitride SNF 2009-06-10 12:24:40: needs test after coat Message-ID: test complete Newlsn 00:15:00 1413 ang From maurice at snf.stanford.edu Wed Jun 10 17:43:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Jun 2009 17:43:22 -0700 Subject: Shutdown tylannitride SNF 2009-06-10 17:43:21: templ reading 400 Message-ID: Tube opened at 800c instead of cooling down From seymour at snf.stanford.edu Thu Jun 11 07:40:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Jun 2009 07:40:19 -0700 Subject: Shutdown tylannitride SNF 2009-06-10 17:43:21: templ reading 400 Message-ID: checked temp and it is reading correctly at this time. what were the test results? From seymour at snf.stanford.edu Thu Jun 11 07:40:42 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Jun 2009 07:40:42 -0700 Subject: Problem tylannitride SNF 2009-06-11 07:40:41: need test after repair. Message-ID: From seymour at snf.stanford.edu Thu Jun 11 15:30:40 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Jun 2009 15:30:40 -0700 Subject: Problem tylannitride SNF 2009-06-11 07:40:41: need test after repair. Message-ID: test was good after repair From nvgirish at snf.stanford.edu Sun Jun 14 00:23:30 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Sun, 14 Jun 2009 00:23:30 -0700 Subject: Problem tylannitride SNF 2009-06-14 00:23:29: MFS alarm; spots on wafer; rust colored residue on boat Message-ID: Ran nitride 2 for 16min. GAve MFS alarm during steps 30 and 35 but process ran ok. Thickness also seems to be reasonable but there are spots visible to the naked eye on few of my wafers. From yeh at snf.stanford.edu Mon Jun 15 21:40:42 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 15 Jun 2009 21:40:42 -0700 Subject: Comment tylannitride SNF 2009-06-15 21:40:41: particles Message-ID: lots of particles on boat 2 and on rods under boat 2. From rhenn at snf.stanford.edu Thu Jun 18 14:53:57 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Thu, 18 Jun 2009 14:53:57 -0700 Subject: Problem tylannitride SNF 2009-06-18 14:53:57: Did not Boat In Completely Message-ID: The boat did not go all the way in. Cuased an MFS alarm during step 30. Gave the door a little push and the tube then pumped down to base pressure. From rhenn at snf.stanford.edu Thu Jun 18 15:22:06 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Thu, 18 Jun 2009 15:22:06 -0700 Subject: Problem tylannitride SNF 2009-06-18 15:22:05: MFS Alarm Step 65 Nitride2 Message-ID: MFS alarm occurred during step 65 of nitride2. From seymour at snf.stanford.edu Fri Jun 19 14:55:25 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:55:25 -0700 Subject: Comment tylannitride SNF 2009-06-19 14:55:25: new filter and oil added Message-ID: From seymour at snf.stanford.edu Fri Jun 26 10:45:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Jun 2009 10:45:46 -0700 Subject: Problem tylannitride SNF 2009-06-18 15:22:05: MFS Alarm Step 65 Nitride2 Message-ID: replaced backfil MFc with a new one. checked operation and it is good. base and leak rate both good. From seymour at snf.stanford.edu Fri Jun 26 10:46:24 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Jun 2009 10:46:24 -0700 Subject: Problem tylannitride SNF 2009-06-18 14:53:57: Did not Boat In Completely Message-ID: loader has been operating normally as of late. From seymour at snf.stanford.edu Fri Jun 26 10:47:51 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Jun 2009 10:47:51 -0700 Subject: Problem tylannitride SNF 2009-06-14 00:23:29: MFS alarm; spots on wafer; rust colored residue on boat Message-ID: system has been operating normally From seymour at snf.stanford.edu Fri Jun 26 10:48:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Jun 2009 10:48:47 -0700 Subject: Comment tylannitride SNF 2009-06-19 14:55:25: new filter and oil added Message-ID: noted From cursive at snf.stanford.edu Tue Jun 30 20:33:09 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 30 Jun 2009 20:33:09 -0700 Subject: Problem tylannitride SNF 2009-06-30 20:33:08: no nitride on Si after deposition Message-ID: After deposition, there is nothing on Si wafers.