Comment tylannitride SNF 2009-05-15 15:08:28: oil change completed
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Jun 3 09:07:57 PDT 2009
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Problem tylannitride SNF 2009-06-02 11:33:04: pump10 won't run, ends with alarm
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Problem tylannitride SNF 2009-06-03 13:43:52: one dummy wafer broken
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noted
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Problem tylannitride SNF 2009-06-02 11:33:04: pump10 won't run, ends with alarm
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Problem tylannitride SNF 2009-06-03 13:43:52: one dummy wafer broken
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