Comment tylannitride SNF 2009-06-06 16:53:03: TEMPL reading 400 all the time

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sat Jun 6 16:53:04 PDT 2009


running nitride2, TEMPL gives 400.0C throughout run and has TCU of 12%.  this means the tube does not cool down before venting after deposition but vents to atmosphere and comes out HOT, ie > 725C according to TEMPC and TEMPS.  i'll measure my wafers as soon as they come out and cool down.  to see if it affected deposition or not and comment that result.




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